Inductance and Current Distribution Extraction in Nb Multilayer Circuits with Superconductive and Resistive Components

We describe a calculation tool and modeling methods to find self and mutual inductance and current distribution in superconductive multilayer circuit layouts. Accuracy of the numerical solver is discussed and compared with experimental measurements. Effects of modeling parameter selection on calculation results are shown, and we make conclusions on the selection of modeling parameters for fast but sufficiently accurate calculations when calibration methods are used. Circuit theory for the calculation of branch impedances from the output of the numerical solver is discussed, and compensation for solution difficulties is shown through example. We elaborate on the construction of extraction models for superconductive integrated circuits, with and without resistive branches. We also propose a method to calculate current distribution in a multilayer circuit with multiple bias current feed points. Finally, detailed examples are shown where the effects of stacked vias, bias pillars, coupling, ground connection stacks and ground return currents in circuit layouts for the AIST advanced process (ADP2) and standard process (STP2) are analyzed. We show that multilayer inductance and current distribution extraction in such circuits provides much more information than merely branch inductance, and can be used to improve layouts; for example through reduced coupling between conductors. key words: ground plane return currents, inductex, layout extraction, numerical inductance calculation, parasitic coupling

[1]  W. H. Henkels,et al.  Accurate measurement of small inductances or penetration depths in superconductors , 1978 .

[2]  M. Yu. Kupriyanov,et al.  3D-MLSI: software package for inductance calculation in multilayer superconducting integrated circuits , 2001 .

[3]  Naoki Takeuchi,et al.  Adiabatic quantum-flux-parametron cell library adopting minimalist design , 2015 .

[4]  Kazuyoshi Takagi,et al.  Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation , 2014, IEICE Trans. Electron..

[5]  Nobuyuki Yoshikawa,et al.  Grounding Methods to Reduce Stray Coupling in Multi-Layer Layouts , 2015, 2015 15th International Superconductive Electronics Conference (ISEC).

[6]  N. Yoshikawa,et al.  Inductance and Coupling of Stacked Vias in a Multilayer Superconductive IC Process , 2015, IEEE Transactions on Applied Superconductivity.

[7]  F. H. Uhlmann,et al.  Inductance calculation for integrated superconducting structures by minimizing free energy , 1995, IEEE Transactions on Applied Superconductivity.

[8]  M. M. Khapaev,et al.  Inductance extraction of superconductor structures with internal current sources , 2014, 1412.3231.

[9]  Nobuyuki Yoshikawa,et al.  Fast and accurate inductance and coupling calculation for a multi-layer Nb process , 2015 .

[10]  W. Marsden I and J , 2012 .

[11]  Kazuyoshi Takagi,et al.  Large-Scale Integrated Circuit Design Based on a Nb Nine-Layer Structure for Reconfigurable Data-Path Processors , 2014, IEICE Trans. Electron..

[12]  Michael Siegel,et al.  Current distribution simulation for superconducting multi-layered structures , 2003 .

[13]  W. Chang,et al.  The inductance of a superconducting strip transmission line , 1979 .

[14]  Naoki Takeuchi,et al.  Design and demonstration of adiabatic quantum-flux-parametron logic circuits with superconductor magnetic shields , 2015 .

[15]  Coenrad J. Fourie,et al.  Fast Multicore FastHenry and a Tetrahedral Modeling Method for Inductance Extraction of Complex 3D Geometries , 2015, 2015 15th International Superconductive Electronics Conference (ISEC).

[16]  Naoki Takeuchi,et al.  Thermodynamic study of energy dissipation in adiabatic superconductor logic , 2015 .

[17]  P ? ? ? ? ? ? ? % ? ? ? ? , 1991 .

[18]  Coenrad J. Fourie,et al.  Three-dimensional multi-terminal superconductive integrated circuit inductance extraction , 2011 .

[19]  A. Krasniewski,et al.  Tools for the computer-aided design of multigigahertz superconducting digital circuits , 1999, IEEE Transactions on Applied Superconductivity.

[20]  Kazuyoshi Takagi,et al.  New Nb multi-layer fabrication process for large-scale SFQ circuits , 2009 .

[21]  Ed Anderson,et al.  LAPACK Users' Guide , 1995 .

[22]  C. J. Fourie,et al.  Calibration of Inductance Calculations to Measurement Data for Superconductive Integrated Circuit Processes , 2013, IEEE Transactions on Applied Superconductivity.

[23]  S. R. Whiteley,et al.  Inductance calculation of 3D superconducting structures , 1999 .