PI 모델을 이용한 마이크로/나노 압전 구동기으 이득감소와 위상지연의 계산

Piezoelectric actuators are widely used for micro/nano positioning in MEMS. lithography instruments and interferometric measurement devices. In control of micro/nano systems. the phase delay originating from hysteresis in piezoelectric materials deteriorates control performance even to instability. A simple and reliable calculation technique for the gain and phase of piezoelectric actuator was newly developed. based on PI (Prandtl-Ishlinskii) model and describing function analysis. The technique will facilitate the design of stable controllers for micro/nano systems with less effort than previous methods requested.