论文信息 - QCM Sensors Based on In2O3 Nano-films Obtained by a Pulsed Plasma Deposition Technique

QCM Sensors Based on In2O3 Nano-films Obtained by a Pulsed Plasma Deposition Technique

In this paper Quartz Crystal Microbalance (QCM) gas sensors obtained depositing nano-films of In2O3 over AT-cut 10 MHz resonators are presented. Films are grown by a Low-Temperature Pulsed Electron Deposition (LTPED), a single-stage growth technology by which films can be deposited on a variety of different substrates Rampino et al. (Appl Phys Lett 101(13):132107, 2012 [1]) down to a few nms thickness, allowing for maintaining large quality factors of the quartzes and for realizing very stable oscillators. The gas sensing performance of these devices are studied by means of experiments with a toxic gas, NO2, water vapor and ethanol. The effect of UV irradiation on the sensor response is also studied. The sensors provide stable and repeatable measurements, a large response to water vapor, and respond reversibly to NO2.

[1] G. Pioggia,et al. A high-performance measurement system for simultaneous mass and resistance variation measurements on gas sensing polymer films , 2005 .

[2] Joseph R. Stetter,et al. The nature of processes controlling the kinetics of indium oxide-based thin film gas sensor response , 2007 .

[3] Andrea Zappettini,et al. 15% efficient Cu(In,Ga)Se2 solar cells obtained by low-temperature pulsed electron deposition , 2012 .

[4] Tommaso Addabbo,et al. A DDS-based Multi-harmonic Frequency Meter for QCM Sensor Applications , 2014 .

[5] Tommaso Addabbo,et al. Quartz crystal microbalance sensors based on TiO2 nanoparticles for gas sensing , 2017, 2017 IEEE International Instrumentation and Measurement Technology Conference (I2MTC).