Ozone Based Atomic Layer Deposition of Hafnium Oxide and Impact of Nitrogen Oxide Species
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J. Swerts | P. Räisänen | A. Delabie | J. Maes | M. Givens | S. Elshocht | E. Shero | S. Jung | J. Peeters | V. Machkaoutsan
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J. Swerts | P. Räisänen | A. Delabie | J. Maes | M. Givens | S. Elshocht | E. Shero | S. Jung | J. Peeters | V. Machkaoutsan