论文信息 - Ozone Based Atomic Layer Deposition of Hafnium Oxide and Impact of Nitrogen Oxide Species - 字舞流文

Ozone Based Atomic Layer Deposition of Hafnium Oxide and Impact of Nitrogen Oxide Species

J. Swerts | P. Räisänen | A. Delabie | J. Maes | M. Givens | S. Elshocht | E. Shero | S. Jung | J. Peeters | V. Machkaoutsan