An automatic-recovery inertial switch based on a gallium-indium metal droplet

In this paper, an automatic-recovery inertial switch is presented which for the first time adopts gallium–indium (EGaIn) as the switching metal droplet. The device consists of a glass substrate with patterned sensing electrodes, a PDMS microfluidic chip with microchannels and microvalves and a metal droplet. Here, we used EGaIn as the conductive element of the switch because it has several advantages compared with other conductive materials such as water or mercury. Specifically, the proposed device has the ability to automatically recover and can be used repeatedly. In the initial off-state, the droplet is stored in the reservoir. During the working state, the metal droplet passes through the channel and connects the sensing electrodes when the acceleration exceeds the designed threshold level. After that, the EGaIn will return to its original position by a subtle use of its structural characteristics.

[1]  Gregory H. Huff,et al.  Manipulating Liquid Metal Droplets in Microfluidic Channels With Minimized Skin Residues Toward Tunable RF Applications , 2015, Journal of Microelectromechanical Systems.

[2]  C. Kim,et al.  Electrostatically actuated metal-droplet microswitches integrated on CMOS chip , 2006, Journal of Microelectromechanical Systems.

[3]  Shey-Shi Lu,et al.  A Passive Inertial Switch Using MWCNT–Hydrogel Composite With Wireless Interrogation Capability , 2013, Journal of Microelectromechanical Systems.

[4]  G. Whitesides,et al.  Eutectic gallium-indium (EGaIn): a moldable liquid metal for electrical characterization of self-assembled monolayers. , 2008, Angewandte Chemie.

[5]  Kwanghyun Yoo,et al.  A Novel Configurable MEMS Inertial Switch using Microscale Liquid-Metal Droplet , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[6]  Gregory H. Huff,et al.  Frequency reconfigurable patch antenna using liquid metal as switching mechanism , 2013 .

[7]  G. Schmidt,et al.  Inertial sensor technology trends , 2001 .

[8]  Yuelin Wang,et al.  Micro-cantilever shocking-acceleration switches with threshold adjusting and 'on'-state latching functions , 2007 .

[9]  Josef Binder,et al.  Acceleration threshold switches from an additive electroplating MEMS process , 2000 .

[10]  Kwanghyun Yoo,et al.  Development and characterization of a novel configurable MEMS inertial switch using a microscale liquid-metal droplet in a microstructured channel , 2011 .

[11]  W. Fang,et al.  Design and implementation of time-delay switch triggered by inertia load , 2013, 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).

[12]  Kwanghyun Yoo,et al.  Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel , 2010 .

[13]  Joonwon Kim,et al.  A micromechanical switch with electrostatically driven liquid-metal droplet , 2002 .

[14]  P. Sen,et al.  A Fast Liquid-Metal Droplet Microswitch Using EWOD-Driven Contact-Line Sliding , 2009, Journal of microelectromechanical systems.

[15]  N. McGruer,et al.  Reliability in Hot Switched Ruthenium on Ruthenium MEMS Contacts , 2013, 2013 IEEE 59th Holm Conference on Electrical Contacts (Holm 2013).

[16]  M. Dickey,et al.  A frequency shifting liquid metal antenna with pressure responsiveness , 2011 .

[17]  Jong-Uk Bu,et al.  Contact materials and reliability for high power RF-MEMS switches , 2007, 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).

[18]  B. Ziaie,et al.  A multiaxial stretchable interconnect using liquid-alloy-filled elastomeric microchannels , 2008 .

[19]  Josef Binder,et al.  Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applications , 2000 .

[20]  Xu Guo,et al.  Adhesive contact of a power-law graded elastic half-space with a randomly rough rigid surface , 2016 .