Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing.

We demonstrate a photonic integrated Mach-Zehnder interferometric sensor, utilizing a plasmonic stripe waveguide in the sensing branch and a photonic variable optical attenuator and a phase shifter in the reference arm to optimize the interferometer operation. The plasmonic sensor is used to detect changes in the refractive index of the surrounding medium exploiting the accumulated phase change of the propagating Surface-Plasmon-Polariton (SPP) mode that is fully exposed in an aqueous buffer solution. The variable optical attenuation stage is incorporated in the reference Si3N4 branch, as the means to counter-balance the optical losses introduced by the plasmonic branch and optimize interference at the sensor output. Bulk sensitivity values of 1930 nm/RIU were experimentally measured for a Mach Zehnder Interferometer (MZI) with a Free Spectral Range of 24.8 nm, along with extinction ratio of more than 35 dB, demonstrating the functional benefits of the co-integration of plasmonic and photonic waveguides.

[1]  Lech Wosinski,et al.  High-sensitivity liquid refractive-index sensor based on a Mach-Zehnder interferometer with a double-slot hybrid plasmonic waveguide. , 2015, Optics express.

[2]  Fang Liu,et al.  Refractive index sensor based on hybrid coupler with short-range surface plasmon polariton and dielectric waveguide , 2012 .

[3]  Eyal Feigenbaum,et al.  Efficient coupling between dielectric-loaded plasmonic and silicon photonic waveguides. , 2010, Nano letters.

[4]  F. Liu,et al.  Extremely high efficient coupling between long range surface plasmon polariton and dielectric waveguide mode , 2009 .

[5]  Qiaoqiang Gan,et al.  Plasmonic interferometers for label-free multiplexed sensing. , 2013, Optics express.

[6]  R. Salas-Montiel,et al.  Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: toward metal-oxide-silicon nanophotonics. , 2010, Nano letters.

[7]  A. Y. Elezzabi,et al.  Experimental realization of subwavelength plasmonic slot waveguides on a silicon platform. , 2010, Optics letters.

[8]  Nikos Pleros,et al.  TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform , 2017 .

[9]  Qiaoqiang Gan,et al.  Plasmonic Mach-Zehnder interferometer for ultrasensitive on-chip biosensing. , 2011, ACS nano.

[10]  Shiyang Zhu,et al.  Silicon nitride based plasmonic components for CMOS back-end-of-line integration. , 2013, Optics express.

[11]  Lech Wosinski,et al.  Hollow hybrid plasmonic Mach-Zehnder sensor. , 2017, Optics letters.

[12]  Fang Liu,et al.  Vertical coupling between short range surface plasmon polariton mode and dielectric waveguide mode , 2009 .

[13]  Oleksiy Krupin,et al.  Mach-Zehnder refractometric sensor using long-range surface plasmon waveguides , 2013 .

[14]  Hui Fan,et al.  Bulk sensing using a long-range surface-plasmon triple-output Mach–Zehnder interferometer , 2016 .

[15]  Lech Wosinski,et al.  Double-Slot Hybrid Plasmonic Ring Resonator Used for Optical Sensors and Modulators , 2015 .

[16]  Jeff Young,et al.  Photonic crystal slot-microcavity circuit implemented in silicon-on-insulator: High Q operation in solvent without undercutting , 2013 .

[17]  J. Homola.  Surface plasmon resonance sensors for detection of chemical and biological species. , 2008, Chemical reviews.

[18]  Feng Liang,et al.  Scalable photonic crystal chips for high sensitivity protein detection. , 2013, Optics express.

[19]  Hairun Guo,et al.  Double inverse nanotapers for efficient light coupling to integrated photonic devices. , 2018, Optics letters.

[20]  A Kumar,et al.  0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics. , 2012, Optics express.

[21]  L. Lechuga,et al.  Recent advances in nanoplasmonic biosensors: applications and lab-on-a-chip integration , 2017 .

[22]  Hui Fan,et al.  Bulk Sensing Using a Long-Range Surface-Plasmon Dual-Output Mach–Zehnder Interferometer , 2016, Journal of Lightwave Technology.

[23]  D Tsiokos,et al.  CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides. , 2018, Optics express.

[24]  Amadeu Griol,et al.  Slot-waveguide biochemical sensor. , 2007, Optics letters.

[25]  F. Karouta,et al.  Photonic crystal slot nanobeam slow light waveguides for refractive index sensing , 2010 .

[26]  B. Lamontagne,et al.  A Silicon-on-Insulator Photonic Wire Based Evanescent Field Sensor , 2006, IEEE Photonics Technology Letters.

[27]  A. Y. Elezzabi,et al.  Monolithic integration of plasmonic waveguides into a complimentary metal-oxide-semiconductor- and photonic-compatible platform , 2010 .

[28]  H. Avramopoulos,et al.  Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip , 2012, IEEE Photonics Technology Letters.

[29]  Nikos Pleros,et al.  Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes , 2018, Scientific Reports.