A service-oriented integration framework for semiconductor manufacturing systems

Currently, manufacturing enterprise integration is mainly conducted using proprietary approaches, which are expensive and time-consuming, resulting in the integrated manufacturing systems with a little business agility. Well-defined and consistent frameworks for integrating a variety of disparate and heterogeneous applications on the shop floor to enable essential business agility to meet the needs of next generation manufacturing are in great demand. This paper presents a service-oriented integration framework for facilitating system integration in an automated semiconductor manufacturing environment. By taking advantage of the advances of open computing service architecture and networked computing technologies, the proposed integration framework aims to provide an integrated automated Semiconductor Manufacturing System (SMS) increased productivity, efficiency and business agility. In the framework, manufacturing processes defined as production services in a Virtual Production Line (VPL) can be dynamically added, adjusted or removed. Moreover, production services can be remotely controlled, monitored and inspected in a timely manner. The results of this research arose out of the successful implementation of enterprise-wide manufacturing process control and recipe management in a small-scale back-end SMS.

[1]  Y. Tang *,et al.  Integrated design approach for virtual production line-based reconfigurable manufacturing systems , 2004 .

[2]  MengChu Zhou,et al.  Virtual production lines design for back-end semiconductor manufacturing systems , 2003 .

[3]  Richard A. Wysk,et al.  Design and implementation of virtual production lines for discrete automated manufacturing systems , 1999 .

[4]  Robin Qiu.  Manufacturing grid: a next generation manufacturing model , 2004, 2004 IEEE International Conference on Systems, Man and Cybernetics (IEEE Cat. No.04CH37583).

[5]  Sanjay B. Joshi,et al.  A structured adaptive supervisory control methodology for modeling the control of a discrete event manufacturing system , 1999, IEEE Trans. Syst. Man Cybern. Part A.

[6]  Jeffrey S. Smith,et al.  Message-based Part State Graphs (MPSG): A formal model for shop-floor control implementation , 2003 .

[7]  Robin G. Qiu,et al.  Enterprise Service Computing: From Concept to Deployment , 2006 .

[8]  Robin G. Qiu,et al.  Virtual production line based WIP control for semiconductor manufacturing systems , 2005 .

[9]  Donald H. Liles,et al.  Engineering the Virtual Enterprise: An Architecture-Driven Modeling Approach , 2001 .

[10]  Robin G. Qiu,et al.  An architecture of configurable equipment connectivity in a future manufacturing information system , 2003, Proceedings 2003 IEEE International Symposium on Computational Intelligence in Robotics and Automation. Computational Intelligence in Robotics and Automation for the New Millennium (Cat. No.03EX694).

[11]  C. Mouli,et al.  Future Fab , 2007, IEEE Spectrum.

[12]  Leon F. McGinnis,et al.  A distributed, event-driven control architecture for flexibly automated manufacturing systems , 2002, Int. J. Comput. Integr. Manuf..

[13]  Howard Smith,et al.  Business Process Management: The Third Wave , 2003 .

[14]  Peter Fingar.  Business Process Fusion Is Inevitable , 2004 .

[15]  R. Qiu,et al.  Design and Development of Component-based Equipment Connectivity for Semiconductor Manufacturing , 2003, 2003 4th International Conference on Control and Automation Proceedings.