A strain-tunable nanoimprint lithography for linear variable photonic crystal filters.

This paper presents the fabrication methodology of a linear variable photonic crystal (PC) filter with narrowband reflection that varies over a broad spectral range along the length of the filter. The key component of the linear variable PC filter is a polymer surface-relief grating whose period changes linearly as a function of its position on the filter. The grating is fabricated using a nanoreplica molding process with a wedge-shaped elastomer mold. The top surface of the mold carries the grating pattern and the wedge is formed by a shallow angle between the top and bottom surfaces of the mold. During the replica molding process, a uniaxial force is applied to stretch the mold, resulting in a nearly linearly varying grating period. The period of the grating is determined using the magnitude of the force and the local thickness of the mold. The grating period of the fabricated device spans a range of 421.8-463.3 nm over a distance of 20 mm. A high refractive index dielectric film is deposited on the graded-period grating to act as the waveguide layer of the PC device. The resonance reflection feature of the device varies linearly in a range of 680.2-737.0 nm over the length of the grating.

[1]  Arvin Emadi,et al.  Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter. , 2012, Optics express.

[2]  Peter Kiesel,et al.  Compact, low-cost, and high-resolution interrogation unit for optical sensors , 2006 .

[3]  Mohsin Ali Badshah,et al.  A programmable nanoreplica molding for the fabrication of nanophotonic devices , 2016, Scientific Reports.

[4]  Robert Magnusson,et al.  Widely tunable guided-mode resonance nanoelectromechanical RGB pixels. , 2007, Optics express.

[5]  L. Guo,et al.  Large-area roll-to-roll and roll-to-plate nanoimprint lithography: a step toward high-throughput application of continuous nanoimprinting. , 2009, ACS nano.

[6]  Robert Magnusson,et al.  Mode-coupling mechanisms of resonant transmission filters. , 2014, Optics express.

[7]  Meng Lu,et al.  A Sensitivity Model for Predicting Photonic Crystal Biosensor Performance , 2008, IEEE Sensors Journal.

[8]  R. Wolffenbuttel,et al.  Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer , 2010 .

[9]  Angela Piegari,et al.  Variable narrow-band transmission filters for spectrometry from space. 2. Fabrication process. , 2008, Applied optics.

[10]  Irena Gershkovich,et al.  Fabrication of a graded-wavelength guided-mode resonance filter photonic crystal , 2006 .

[11]  Angela Piegari,et al.  Variable narrowband transmission filters with a wide rejection band for spectrometry. , 2006, Applied optics.

[12]  Robert Magnusson,et al.  Efficient Guided-Mode-Resonant Tunable Color Filters , 2012, IEEE Photonics Technology Letters.

[13]  Robert Magnusson,et al.  Use of nondegenerate resonant leaky modes to fashion diverse optical spectra. , 2004, Optics express.

[14]  B. Cunningham,et al.  Compact wavelength detection system incorporating a guided-mode resonance filter , 2007 .

[15]  Robert Magnusson,et al.  Guided-mode resonances in planar dielectric-layer diffraction gratings , 1990 .

[16]  R. Magnusson,et al.  Filter-response line shapes of resonant waveguide gratings , 1996 .

[17]  C. Lu,et al.  Interference lithography: a powerful tool for fabricating periodic structures , 2010 .

[18]  R. Bhargava,et al.  Sculpting narrowband Fano resonances inherent in the large-area mid-infrared photonic crystal microresonators for spectroscopic imaging. , 2014, Optics express.

[19]  A. Friesem,et al.  Resonant grating waveguide structures , 1997 .