Large displacement control system beyond pull-in limitation in electro-static micro cantilever

A displacement control system for an electrostatic drive cantilever beyond the pull-in limit is newly proposed using a feedback control. The electrostatic force is linearized around a target position for the purpose to obtain a linearized equation. Based on the equation of motion, the feedback control system is designed by the optimal regulator. The system performance is evaluated by a numerical simulation using a distributed parameter system for the electrostatic drive cantilever. The simulation results show divergent states by the 2nd. resonance mode of the cantilever. To overcome the unstable state, idealistic low-pass filter is added on the feedback loop to cut off higher resonance mode. The system shows stable operation for large displacement over the pull-in limitation.

[1]  H. Nathanson,et al.  The resonant gate transistor , 1967 .

[2]  Yu-Chong Tai,et al.  Integrated movable micromechanical structures for sensors and actuators , 1988 .

[3]  Albert P. Pisano,et al.  Polysilicon microgripper , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[4]  J. Fluitman,et al.  Electrostatic curved electrode actuators , 1995 .

[5]  Y. Hirai,et al.  Study of large bending and low voltage drive electrostatic actuator with novel shaped cantilever and electrode , 1998, MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388).