The two-dimensional micro conveyer: principles and fabrication process of the actuator

We present a two-dimensional micro conveyer which utilizes electromagnetic force. The micro conveyer comprises a two-layer planar coil array 40 mm/sup 2/ in size for the stator and a permanent magnet for the mover. This paper describes the design principle, calculation of thrust, fabrication process of the planar coil array and conveyance properties of the fabricated micro conveyer. Three driving methods are discussed: linear DC motor (LDM), linear induction motor (LIM) and linear pulse motor (LPM). The maximum conveyance mass of 1.2 g were obtained with the applied current of 1 A/phase and the maximum conveyance speed was 30 mm/sec without a conveyance object when the NdFeB magnet 5/spl times/5/spl times/1 mm/sup 3/ in size magnetized in the vertical direction was used as the mover.