Theoretical investigation of subwavelength structure fabrication based on multi-exposure surface plasmon interference lithography

Abstract We propose a method of fabricating subwavelength structures based on multi-exposure surface plasmon interference lithography. This new nanolithography technique fabricates various subwavelength structures breaking the diffraction limit, which differs from the common method of writing various micro structures by using a two-laser-beam interference with sample rotation. Analysis of the optical field distributions obtained using the proposed nanolithography technique, which was performed using the theory of surface plasmon interference lithography in combination with coordinate matrix transformation, is also provided. Various special subwavelength structures are demonstrated by presenting simulated optical field distributions corresponding to different sample rotations, including two-dimensional lattice structures and periodic quasi-hexagonal structures. These structures are potentially useful in micro- and nano-optics applications.

[1]  Ampere A Tseng,et al.  Recent developments in nanofabrication using focused ion beams. , 2005, Small.

[2]  K. V. Sreekanth,et al.  Single-exposure maskless plasmonic lithography for patterning of periodic nanoscale grating features , 2010 .

[3]  X. Ye,et al.  Nanostrip-Induced High Tunability Multipolar Fano Resonances in a Au Ring-Strip Nanosystem , 2018, Nanomaterials.

[4]  Partha Pratim Sahu,et al.  Theoretical Investigation of All Optical Switch Based on Compact Surface Plasmonic Two Mode Interference Coupler , 2016, Journal of Lightwave Technology.

[5]  X. Ye,et al.  Plasmonic Absorption Enhancement in Elliptical Graphene Arrays , 2018, Nanomaterials.

[6]  Chunman Yan,et al.  Refractive Index Sensor Based on Fano Resonances in Plasmonic Waveguide With Dual Side-Coupled Ring Resonators , 2018, Photonic Sensors.

[7]  Chao Liu,et al.  Symmetrical dual D-shape photonic crystal fibers for surface plasmon resonance sensing. , 2018, Optics express.

[8]  Wenxiao Su.  Porous Honeycomb-like Carbon Prepared by a Facile Sugar- Blowing Method for High-Performance Lithium-Sulfur Batteries , 2018, International Journal of Electrochemical Science.

[9]  Large area sub-wavelength azo-polymer gratings by waveguide modes interference lithography , 2013 .

[10]  J. Chen,et al.  Engineering the magnetic plasmon resonances of metamaterials for high-quality sensing. , 2017, Optics express.

[11]  L. Pan,et al.  Strong optical force and its confinement applications based on heterogeneous phosphorene pairs. , 2018, Optics express.

[12]  Silvia Mittler,et al.  Multiexposure laser interference lithography , 2015 .

[13]  Hisato Uetsuka,et al.  Design of a silicon polarization grating with a sub-wavelength anisotropic structure , 2016, SPIE OPTO.

[14]  K. V. Sreekanth,et al.  Four beams surface plasmon interference nanoscale lithography for patterning of two-dimensional periodic features , 2010 .

[15]  Yun-tuan Fang,et al.  Singular pole and enhanced sensitivity of PT-symmetric layered structure with resonators , 2018, The European Physical Journal Applied Physics.

[16]  Yunping Qi,et al.  Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference , 2017 .

[17]  Javier Aizpurua,et al.  Metallic nanoparticle arrays: a common substrate for both surface-enhanced Raman scattering and surface-enhanced infrared absorption. , 2008, ACS nano.

[18]  Yongtian Wang,et al.  Surface plasmon interference lithography with a surface relief metal grating , 2013 .

[19]  Yan Wang,et al.  Multispectral spatial and frequency selective sensing with ultra-compact cross-shaped antenna plasmonic crystals , 2015 .

[20]  A large-area photolithography technique based on surface plasmons leakage modes , 2008 .

[21]  Hyunhyub Ko,et al.  Nanostructured surfaces and assemblies as SERS media. , 2008, Small.

[22]  Mark A. McCord,et al.  Electron beam lithography for 0.13 μm manufacturing , 1997 .

[23]  Peng Mao,et al.  Surface-Plasmon-Polaritons-Assisted Enhanced Magnetic Response at Optical Frequencies in Metamaterials , 2016, IEEE Photonics Journal.

[24]  S. Matsui,et al.  Double patterning in nanoimprint lithography , 2013 .

[25]  Christophe Vieu,et al.  Electron beam lithography: resolution limits and applications , 2000 .

[26]  Zao Yi,et al.  Absorption enhancement in double-layer cross-shaped graphene arrays , 2018 .

[27]  T. LaBean,et al.  Surface‐Initiated Polymerization on Nanopatterns Fabricated by Electron‐Beam Lithography , 2004 .

[28]  Xinxin Zhao,et al.  Synthesis and theoretical study of large-sized Bi4Ti3O12 square nanosheets with high photocatalytic activity , 2018, Materials Research Bulletin.

[29]  Jicheng Wang,et al.  Characteristics of multiple Fano resonances in waveguide-coupled surface plasmon resonance sensors based on waveguide theory , 2018, Scientific Reports.

[30]  Zhaowei Liu,et al.  Projecting deep-subwavelength patterns from diffraction-limited masks using metal-dielectric multilayers , 2008 .

[31]  Theoretical Analysis of Interference Nanolithography of Surface Plasmon Polaritons without a Match Layer , 2009 .

[32]  Jinglei Du,et al.  A practical nanofabrication method: surface plasmon polaritons interference lithography based on backside-exposure technique. , 2010, Optics express.

[33]  Hua Yang,et al.  Assembly of Ag3PO4 nanoparticles on rose flower-like Bi2WO6 hierarchical architectures for achieving high photocatalytic performance , 2018, Journal of Materials Science: Materials in Electronics.

[34]  Changtao Wang,et al.  Large area and deep sub-wavelength interference lithography employing odd surface plasmon modes , 2016, Scientific Reports.

[35]  Chao Liu,et al.  Mid-infrared surface plasmon resonance sensor based on photonic crystal fibers. , 2017, Optics express.

[36]  Yunping Qi,et al.  Investigation of wide-range refractive index sensor based on asymmetric metal-cladding dielectric waveguide structure , 2018, AIP Advances.

[37]  Hua Yang,et al.  Theoretical study of multiexposure zeroth-order waveguide mode interference lithography , 2018, Optical and Quantum Electronics.

[38]  X. Ye,et al.  Tunable absorption enhancement in electric split-ring resonators-shaped graphene arrays , 2018 .