论文信息 - Structural properties of hot wire a-Si:H films deposited at rates in excess of 100 /s - 字舞流文

Structural properties of hot wire a-Si:H films deposited at rates in excess of 100 /s

L. Gedvilas | A. Mahan | B. Nelson | Yirong Xu | W. Beyer | M. Vaněček | D. Williamson | J. Perkins