Fabrication of solenoid-type microinductor with different magnetic core schemes by MEMS technique

Two micromachined solenoid-type inductors with different electroplated core structures, ellipse and rectangle, were fabricated, tested and compared in order to reach optimum designs for integrated inductors and transformers. In the process of fabrication, UV-LIGA, dry etching technique, fine polishing and electroplating techniques have been adopted to achieve high performance microinductor. Experimental results show that both types of the inductors are characterized by high inductance, Q-factor and low electrical resistance. While the inductance of the inductor with rectangular magnetic core is slightly higher than that with elliptical magnetic core, the quality factor of the latter is larger than that of the former.