Extreme ultraviolet emission of laser-produced plasmas using a cryogenic xenon target

In this article we show that laser-produced plasmas using a cryogenic xenon target are emitters of pulsed broadband extreme ultraviolet radiation with an intensity maximum around 11 nm. The photon flux and conversion efficiency (CE) of this source is comparable to the emission of laser-produced plasmas of solid state targets using elements with high atomic numbers. The CE of the laser-produced xenon plasma in a 2% wavelength band at the beryllium absorption K edge at 11.1 nm is about two times higher compared to the CE at the silicon absorption L edge at 12.4 nm.

[1]  T. Wilhein,et al.  Soft x-ray emission of laser-produced plasmas using a low-debris cryogenic nitrogen target , 1998 .

[2]  P. W. Fisher,et al.  A cryogenic xenon droplet generator for use in a compact laser plasma x-ray source , 1997 .

[3]  B. L. Henke,et al.  X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92 , 1993 .

[4]  Martin Richardson,et al.  Characterization of a Flat-Field Grazing-Incidence XUV Spectrometer , 1993 .

[5]  Hans M. Hertz,et al.  Liquid-jet target for laser-plasma soft x-ray generation , 1996 .

[6]  N. Ceglio,et al.  Wavelength considerations in soft-x-ray projection lithography. , 1993, Applied optics.

[7]  Tanya E. Jewell,et al.  Reflective systems design study for soft x‐ray projection lithography , 1990 .

[8]  F. Scholze,et al.  CALIBRATION OF CHARGE COUPLED DEVICES AND A PINHOLE TRANSMISSION GRATING TO BE USED AS ELEMENTS OF A SOFT X-RAY SPECTROGRAPH , 1997 .

[9]  M. Klosner,et al.  Intense xenon capillary discharge extreme-ultraviolet source in the 10-16-nm-wavelength region. , 1998, Optics letters.

[10]  Gerry O'Sullivan,et al.  4d–4f emission resonances in laser-produced plasmas , 1981 .

[11]  Perry,et al.  Strong x-ray emission from high-temperature plasmas produced by intense irradiation of clusters. , 1995, Physical review letters.

[12]  Gerry O'Sullivan,et al.  Spectra of Xe vii, viii, and ix in the extreme ultraviolet: 4d–mp, nf transitions , 1983 .

[13]  Jack Sugar,et al.  Analysis of the 4d 9 –4d 8 5p transitions in nine-times ionized xenon (Xe x) , 1983 .

[14]  Andrzej Bartnik,et al.  High-resolution measurement, line identification, and spectral modeling of the K{beta} spectrum of heliumlike argon emitted by a laser-produced plasma using a gas-puff target , 1997 .

[15]  N. Ceglio,et al.  Front-end design issues in soft-x-ray projection lithography. , 1993, Applied optics.

[16]  Richard H. Stulen,et al.  Application of laser plasma sources in soft x-ray projection lithography , 1994, Optics & Photonics.