Thin-Film Deposition of Silicon-Incorporated Diamond-Like Carbon by Plasma-Enhanced Chemical Vapor Deposition Using Monomethylsilane as a Silicon Source
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M. Suemitsu | T. Endoh | M. Mashita | T. Itoh | K. Yasui | H. Nakazawa | T. Kinoshita | Y. Enta | A. Konno | Y. Narita | Toshimi Abe | Yuhki Asai