Multilayer actuators: review

This review discusses issues related to durability and fatigue of multilayer actuator devices. Published research in the areas of processing, internal electrode configuration, and materials composition (ceramic and electrode) is discussed. The effects of humidity, temperature, and mechanical and electrical load on the lifetime of these devices are outlined. Techniques that have been developed to monitor the development of damage are also reviewed.

[1]  Zhigang Suo,et al.  Cracking in ceramic actuators caused by electrostriction , 1994 .

[2]  Kenji Uchino,et al.  Multilayer Ceramic Actuators , 1996 .

[3]  William J. Borland,et al.  Electrode-based causes of delaminations in multilayer ceramic capacitors , 1989 .

[4]  K. Nagata,et al.  Relationship between Lifetime of Multilayer Ceramic Actuator and Temperature , 1995 .

[5]  S. Yoshikawa,et al.  A STUDY OF ACOUSTIC EMISSION IN PIEZOELECTRIC MULTILAYER CERAMIC ACTUATOR , 1998 .

[6]  Kenji Uchino,et al.  Heat generation in multilayer piezoelectric actuators , 1996 .

[7]  Toshio Tsuchiya,et al.  Lifetime and Degradation Mechanism of Multilayer Ceramic Actuator , 1998 .

[8]  K. Uchino,et al.  Dynamic Observation of Crack Propagation in Piezoelectric Multilayer Actuators , 1993 .

[9]  Kenji Uchino,et al.  Tailoring the Performance of Ceramic-metal Piezocomposite Actuators, 'cymbals' , 1998 .

[10]  K. Nagata,et al.  Effect of Humidity on Life Time of Multilayer Ceramic Actuator , 1995 .

[11]  H. Mase,et al.  Gap Structure Multilayer Piezoelectric Actuator , 1991 .

[12]  K. Nagata,et al.  Life Time of Multilayer Ceramic Actuator at High Temperature , 1994 .

[13]  A. Bell,et al.  Improved Compaction in Multilayer Capacitor Fabrication , 1999 .

[14]  J.W.C. de Vries,et al.  Functional behavior of ceramic multilayer actuators with inactive parts , 1999 .

[15]  K. Uchino.  Materials issues in design and performance of piezoelectric actuators: an overview , 1998 .

[16]  Manfred Kahn,et al.  Flaw detection in d33 mode multilayer ceramic actuators using impedance-frequency scans , 1996 .

[17]  B. V. Hiremath,et al.  Manufacture of ceramic components , 1995 .

[18]  C. Bowen,et al.  Non-destructive evaluation of multi-layer actuators , 2000 .

[19]  Richard G. Geyer,et al.  Electromechanical Resonances in Ceramic Capacitors and Their Use for Rapid Nondestructive Testing , 1989 .

[20]  K. Uchino,et al.  Destruction Mechanisms in Ceramic Multilayer Actuators , 1994 .

[21]  L. E. Cross,et al.  Effects of porosity on electric fatigue behaviour in PLZT and PZT ferroelectric ceramics , 1993 .