论文信息 - Performance of MOSFETs with ultra thin ZrO/sub 2/ and Zr silicate gate dielectrics - 字舞流文

Performance of MOSFETs with ultra thin ZrO/sub 2/ and Zr silicate gate dielectrics

K. Onishi | B. Lee | L. Kang | V. Kaushik | J. Lee | J. Finder | K. Eisenbeiser | R. Nieh | W. Qi | Y. Jeon | Bich Yen Neuyen | L. Prabhu