Piezoelectric material selection is crucial in the design of piezoelectric micro energy harvesters. Different figures of merit (FOMs) have been sought to compare and to form a preference of piezoelectric materials depending on the applications. FOMs may include the operational bandwidth and the cost in addition to the energy conversion efficiency at MEMS-scale. This paper reviews only FOMs that are related to energy conversion efficiency. The FOMs for MEMS harvesters should be much different from the FOMs for bulk piezoelectric material harvesters. After analyzing composite beam based MEMS energy harvesters, accurate evaluation on the holistic efficiency is obtained. Also a new FOM is proposed to represent the energy conversion capacity of the piezoelectric materials, which existing FOMs do not take into account.
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