A new biaxial silicon resonant micro accelerometer

A new biaxial silicon resonant accelerometer characterized by a high sensitivity and a low cross-axis sensitivity is presented in this paper. The device allows for the simultaneous measure of acceleration acting along two different axes using two couples of resonating slender beams linked to two couples of flexible beams and to a proof mass. The conceptual scheme used for the biaxial resonant accelerometer is similar to the one applied for the uniaxial resonant accelerometer reported in [1]–[3]. Experimental results demonstrate a differential sensitivity of 201 Hz/g around a resonance frequency of 84 kHz.

[1]  Helmut Seidel,et al.  Resonant accelerometer with self-test , 2001 .

[2]  R. Olsson,et al.  Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers , 2008, Journal of Microelectromechanical Systems.

[3]  Lei Liu,et al.  An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer , 2009, Sensors.

[4]  Sebastien Hentz,et al.  A Small and High Sensitivity Resonant Accelerometer , 2009 .

[5]  T. A. Roessig,et al.  Surface-micromachined resonant accelerometer , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[6]  Alberto Corigliano,et al.  A new two-beam differential resonant micro accelerometer , 2009, 2009 IEEE Sensors.

[7]  Yi-Chung Lo,et al.  Design considerations of the biaxial frequency-shifted microaccelerometer , 2001, SPIE Micro + Nano Materials, Devices, and Applications.

[8]  Osamu Tabata,et al.  Two-axis detection resonant accelerometer based on rigidity change , 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[9]  Shih-Chia Chang,et al.  Resonant-bridge two axis microaccelerometer , 1990 .

[10]  Giacomo Langfelder,et al.  Low-noise real-time measurement of the position of movable structures in MEMS , 2008 .

[11]  Alberto Corigliano,et al.  A high sensitivity uniaxial resonant accelerometer , 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).

[12]  Alberto Corigliano,et al.  A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit , 2010, Journal of Microelectromechanical Systems.