A simple compliance modeling method for flexure hinges

Various types of flexure hinges have been introduced and implemented in a variety of fields due to their superior performances. The Castigliano’s second theorem, the Euler-Bernoulli beam theory based direct integration method and the unit-load method have been employed to analytically describe the elastic behavior of flexure hinges. However, all these methods require prior-knowledge of the beam theory and need to execute laborious integration operations for each term of the compliance matrix, thus highly decreasing the modeling efficiency and blocking practical applications of the modeling methods. In this paper, a novel finite beam based matrix modeling (FBMM) method is proposed to numerically obtain compliance matrices of flexure hinges with various shapes. The main concept of the method is to treat flexure hinges as serial connections of finite micro-beams, and the shearing and torsion effects of the hinges are especially considered to enhance the modeling accuracy. By means of matrix calculations, complete compliance matrices of flexure hinges can be derived effectively in one calculation process. A large number of numerical calculations are conducted for various types of flexure hinges with different shapes, and the results are compared with the ones obtained by conventional modeling methods. It demonstrates that the proposed modeling method is not only efficient but also accurate, and it is a more universal and more robust tool for describing elastic behavior of flexure hinges.

[1]  Tatsuo Arai,et al.  Kinematic analysis of translational 3-DOF micro parallel mechanism using matrix method , 2000, Proceedings. 2000 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2000) (Cat. No.00CH37113).

[2]  Xinbo Huang,et al.  A new generalized model for elliptical arc flexure hinges. , 2008, The Review of scientific instruments.

[3]  J. Paros How to design flexure hinges , 1965 .

[4]  Matt Cullin,et al.  Planar Compliances of Symmetric Notch Flexure Hinges: The Right Circularly Corner-Filleted Parabolic Design , 2014, IEEE Transactions on Automation Science and Engineering.

[5]  Bijan Shirinzadeh,et al.  Development of a novel flexure-based microgripper for high precision micro-object manipulation , 2009 .

[6]  S O R Moheimani,et al.  Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues. , 2012, The Review of scientific instruments.

[7]  Nicolae Lobontiu,et al.  In-plane elastic response of two-segment circular-axis symmetric notch flexure hinges: The right circular design , 2013 .

[8]  D M Marsh The construction and performance of various flexure hinges , 1962 .

[9]  Lei Zhu,et al.  Development of a piezoelectrically actuated two-degree-of-freedom fast tool servo with decoupled motions for micro-/nanomachining , 2014 .

[10]  Nicolae Lobontiu,et al.  Parabolic and hyperbolic flexure hinges: flexibility, motion precision and stress characterization based on compliance closed-form equations , 2002 .

[11]  N. Lobontiu,et al.  Stiffness characterization of corner-filleted flexure hinges , 2004 .

[12]  Xiaoyuan Liu,et al.  Elliptical-Arc-Fillet Flexure Hinges: Toward a Generalized Model for Commonly Used Flexure Hinges , 2011 .

[13]  N. Lobontiu,et al.  A generalized analytical compliance model for transversely symmetric three-segment flexure hinges. , 2011, The Review of scientific instruments.

[14]  Zhaoying Zhou,et al.  Design calculations for flexure hinges , 2002 .

[15]  David Zhang,et al.  Three flexure hinges for compliant mechanism designs based on dimensionless graph analysis , 2010 .

[16]  Dae-Gab Gweon,et al.  Analysis and design of a cartwheel-type flexure hinge , 2013 .

[17]  Nicolae Lobontiu,et al.  Design of symmetric conic-section flexure hinges based on closed-form compliance equations , 2002 .

[18]  Qiang Liu,et al.  Multi-objective optimum design of fast tool servo based on improved differential evolution algorithm , 2011 .

[19]  Qingsong Xu,et al.  A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation , 2011, IEEE Transactions on Automation Science and Engineering.

[20]  David Zhang,et al.  Closed-form compliance equations of filleted V-shaped flexure hinges for compliant mechanism design , 2010 .

[21]  Y. K. Yong,et al.  Design of an Inertially Counterbalanced $Z$ -Nanopositioner for High-Speed Atomic Force Microscopy , 2013, IEEE Transactions on Nanotechnology.

[22]  G. Cowper The Shear Coefficient in Timoshenko’s Beam Theory , 1966 .

[23]  Nicolae Lobontiu,et al.  Two-axis flexure hinges with axially-collocated and symmetric notches , 2003 .

[24]  Qingsong Xu,et al.  Design and Analysis of a Totally Decoupled Flexure-Based XY Parallel Micromanipulator , 2009, IEEE Transactions on Robotics.

[25]  Qingsong Xu,et al.  Development and Assessment of a Novel Decoupled XY Parallel Micropositioning Platform , 2010, IEEE/ASME Transactions on Mechatronics.

[26]  Hou Wen The Flexibility Calculation of Biaxial Right Circular Flexible Hinge , 2010 .

[27]  Tien-Fu Lu,et al.  The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages , 2008 .

[28]  Yangmin Li,et al.  A Compliant Parallel XY Micromotion Stage With Complete Kinematic Decoupling , 2012, IEEE Transactions on Automation Science and Engineering.

[29]  Yangmin Li,et al.  Design, Analysis, and Test of a Novel 2-DOF Nanopositioning System Driven by Dual Mode , 2013, IEEE Transactions on Robotics.

[30]  Tien-Fu Lu,et al.  Review of circular flexure hinge design equations and derivation of empirical formulations , 2008 .

[31]  Jianyuan Jia,et al.  A generalized model for conic flexure hinges. , 2009, The Review of scientific instruments.

[32]  Stuart T. Smith,et al.  ELLIPTICAL FLEXURE HINGES , 1997 .

[33]  Nicolae Lobontiu,et al.  Corner-Filleted Flexure Hinges , 2001 .

[34]  C. Pan,et al.  Closed-form compliance equations for power-function-shaped flexure hinge based on unit-load method , 2013 .

[35]  Bi Shusheng,et al.  Dimensionless design graphs for three types of annulus-shaped flexure hinges , 2010 .

[36]  Larry L. Howell,et al.  Two general solutions of torsional compliance for variable rectangular cross-section hinges in compliant mechanisms , 2009 .

[37]  I-Ming Chen,et al.  Stiffness modeling of flexure parallel mechanism , 2005 .

[38]  J. M. Paros,et al.  Flexure Pivots to Replace Knife Edge and Ball Bearing , 1965 .

[39]  Eric R. Marsh,et al.  A unified geometric model for designing elastic pivots , 2008 .

[40]  Saša Zelenika,et al.  Optimized flexural hinge shapes for microsystems and high-precision applications , 2009 .