Principles and Applications of the qPlus Sensor

The concept of the atomic force microscope (AFM) is a very simple one: map the surface of a sample by a sharp probe that scans over the surface similar to the finger of a blind person that reads Braille characters. In AFM, the role of that finger is taken by the probe tip that senses the presence of the sample surface by detecting the force between the tip of the probe and a sample. The qPlus sensor is a self sensing cantilever based on a quartz tuning fork that supplements the traditional microfabricated cantilevers made of silicon. Quartz tuning forks are used in the watch industry in quantities of billions annually, with the positive effects on quality and perfection. Three properties of these quartz-based sensors simplify the AFM significantly: (1) the piezoelectricity of quartz allows simple self sensing, (2) the mechanical properties of quartz show very small variations with temperature, and (3) the given stiffness of many quartz tuning forks is close to the ideal stiffness of cantilevers. The key properties of the qPlus sensor are a large stiffness that allows small amplitude operation, the large size that allows to mount single-crystal probe tips, and the self-sensing piezoelectric detection mechanism.

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