论文信息 - Analysis of irregular increase in sheet resistance of Ni silicides on transition from NiSi to NiSi2 - 字舞流文

Analysis of irregular increase in sheet resistance of Ni silicides on transition from NiSi to NiSi2

H. Iwai | P. Ahmet | K. Kakushima | Y. Okuno | M. Kubota | K. Tsutsui | T. Shiozawa | K. Nagahiro | M. Matsumoto | R. Xiang