论文信息 - Single-step synthesis process of Ti3SiC2 ohmic contacts on 4H-SiC by sputter-deposition of Ti - 字舞流文

Single-step synthesis process of Ti3SiC2 ohmic contacts on 4H-SiC by sputter-deposition of Ti

A. Spetz | M. Andersson | C. Zetterling | H. Fashandi | Jun Lu | P. Eklund | Katarina Smedfors | J. Eriksson