Degradation of Crystalline Silicon Due to Boron–Oxygen Defects

This paper gives an overview on the current understanding of a technologically relevant defect group in crystalline silicon related to the presence of boron and oxygen. It is commonly addressed as boron-oxygen defects and has been found to affect silicon devices, whose performance depends on minority charge carrier diffusion lengths-such as solar cells. The defects are a common limitation in Czochralski-grown p-type silicon, and their recombination activity develops under charge carrier injection and is, thus, commonly referred to as light-induced degradation. A multitude of studies investigating the effect have been published and introduced various trends and interpretations. This review intends to summarize established trends and provide a consistent nomenclature for the defect transitions in order to simplify discussion.

[1]  V. Voronkov,et al.  Permanent deactivation of boron–oxygen recombination centres in silicon , 2016 .

[2]  M. Schubert,et al.  Characterization and modelling of the boron-oxygen defect activation in compensated n-type silicon , 2015 .

[3]  R. Søndenå,et al.  The role of excess minority carriers in light induced degradation examined by photoluminescence imaging , 2012 .

[4]  A. Herguth,et al.  A New Approach to Prevent the Negative Impact of the Metastable Defect in Boron Doped CZ Silicon Solar Cells , 2006, 2006 IEEE 4th World Conference on Photovoltaic Energy Conference.

[5]  S. Wenham,et al.  Influence of Hydrogen on the Mechanism of Permanent Passivation of Boron–Oxygen Defects in p-Type Czochralski Silicon , 2015, IEEE Journal of Photovoltaics.

[6]  B. Lim,et al.  Permanent recovery of electron lifetime in pre-annealed silicon samples: A model based on Ostwald ripening , 2012 .

[7]  K. Bothe,et al.  Impact of oxygen on the permanent deactivation of boron–oxygen-related recombination centers in crystalline silicon , 2010 .

[8]  G. Hahn,et al.  Influence of hydrogen on the regeneration of boron-oxygen related defects in crystalline silicon , 2013 .

[9]  S. Uda,et al.  Effects of B and Ge codoping on minority carrier lifetime in Ga-doped Czochralski-silicon , 2009 .

[10]  Karsten Bothe,et al.  Lifetime-degrading boron-oxygen centres in p-type and n-type compensated silicon , 2011 .

[11]  D. Macdonald,et al.  Influence of net doping, excess carrier density and annealing on the boron oxygen related defect density in compensated n-type silicon , 2011 .

[12]  Deren Yang,et al.  Germanium-doped crystalline silicon: A new substrate for photovoltaic application , 2013 .

[13]  Halvard Haug,et al.  Studying Light-Induced Degradation by Lifetime Decay Analysis: Excellent Fit to Solution of Simple Second-Order Rate Equation , 2013, IEEE Journal of Photovoltaics.

[14]  Stuart Wenham,et al.  Accelerated formation of the boron–oxygen complex in p‐type Czochralski silicon , 2015 .

[15]  K. Bothe,et al.  Structure and transformation of the metastable boron- and oxygen-related defect center in crystalline silicon , 2004 .

[16]  M. Schubert,et al.  Fast in-situ photoluminescence analysis for a recombination parameterization of the fast BO defect component in silicon , 2016 .

[17]  Wilhelm Warta,et al.  Minority carrier lifetime degradation in boron-doped Czochralski silicon , 2001 .

[18]  S. Glunz,et al.  Advanced lifetime spectroscopy: unambiguous determination of the electronic properties of the metastable defect in boron-doped CZ-Si , 2003, 3rd World Conference onPhotovoltaic Energy Conversion, 2003. Proceedings of.

[19]  G. Hahn,et al.  Of apples and oranges : why comparing BO regeneration rates requires injection level correction , 2016 .

[20]  Lifetime recovery in p-type Czochralski silicon due to the reconfiguration of boron–oxygen complexes via a hole-emitting process , 2011 .

[21]  Tine U. Nærland,et al.  Direct monitoring of minority carrier density during light induced degradation in Czochralski silicon by photoluminescence imaging , 2013 .

[22]  K. Ramspeck,et al.  Light Induced Degradation of Rear Passivated mc-Si Solar Cells , 2012 .

[23]  Jan Schmidt,et al.  Impact of hydrogen on the permanent deactivation of the boron-oxygen-related recombination center in crystalline silicon , 2016 .

[24]  R. Newman,et al.  Oxygen diffusion and precipitation in Czochralski silicon , 2000 .

[25]  Karsten Bothe,et al.  Light-Induced Degradation of the Carrier Lifetime in n-Type Czochralski-Grown Silicon Doped with Boron and Phosphorus , 2011 .

[26]  J. Garandet,et al.  Slow down of the light-induced-degradation in compensated solar-grade multicrystalline silicon , 2008 .

[27]  S. Glunz,et al.  Determining the defect parameters of the deep aluminum-related defect center in silicon , 2007 .

[28]  S. Wenham,et al.  Evidence for the role of hydrogen in the stabilization of minority carrier lifetime in boron-doped Czochralski silicon , 2015 .

[29]  Eicke R. Weber,et al.  Iron and its complexes in silicon , 1999 .

[30]  W. Read,et al.  Statistics of the Recombinations of Holes and Electrons , 1952 .

[31]  R. Hezel,et al.  Investigation of carrier lifetime instabilities in Cz-grown silicon , 1997, Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997.

[32]  Stefan Rein,et al.  Light-induced degradation in compensated p- and n-type Czochralski silicon wafers , 2011 .

[33]  S. Wenham,et al.  Modelling Kinetics of the Boron-Oxygen Defect System☆ , 2016 .

[34]  Antti Haarahiltunen,et al.  Role of copper in light induced minority-carrier lifetime degradation of silicon , 2009 .

[35]  Giso Hahn,et al.  Kinetics of the boron-oxygen related defect in theory and experiment , 2010 .

[36]  S. Wenham,et al.  Fast and slow lifetime degradation in boron‐doped Czochralski silicon described by a single defect , 2016 .

[37]  Karsten Bothe,et al.  Lifetimes exceeding 1 ms in 1-Ω cm boron-doped Cz-silicon , 2014 .

[38]  Karsten Bothe,et al.  Parameterisation of injection-dependent lifetime measurements in semiconductors in terms of Shockley-Read-Hall statistics: An application to oxide precipitates in silicon , 2012 .

[39]  D. Macdonald,et al.  The Role of Silicon Interstitials in the Formation of Boron-Oxygen Defects in Crystalline Silicon , 2005 .

[40]  G. Hahn,et al.  Avoiding boron-oxygen related degradation in highly boron doped Cz silicon , 2006 .

[41]  S. Glunz,et al.  Improvement of charge minority‐carrier lifetime in p(boron)‐type Czochralski silicon by rapid thermal annealing , 2001 .

[42]  Karsten Bothe,et al.  Fundamental boron–oxygen‐related carrier lifetime limit in mono‐ and multicrystalline silicon , 2005 .

[43]  K. Bothe,et al.  Accelerated deactivation of the boron?oxygen-related recombination centre in crystalline silicon , 2011 .

[44]  R. Kopecek,et al.  Crystalline Si Solar Cells from Compensated Material: Behaviour of Light Induced Degradation , 2008 .

[45]  Deren Yang,et al.  Suppression of boron–oxygen defects in p-type Czochralski silicon by germanium doping , 2010 .

[46]  Stefan Rein,et al.  UMG n-type Cz-silicon: Influencing Factors of the Light-induced Degradation and its Suitability for PV Production☆ , 2014 .

[47]  A. Cuevas,et al.  Boron-oxygen defect in Czochralski-silicon co-doped with gallium and boron , 2012 .

[48]  Giso Hahn,et al.  Influence of bound hydrogen states on BO-regeneration kinetics and consequences for high-speed regeneration processes , 2014 .

[49]  T. Saitoh,et al.  Effect of illumination conditions on Czochralski-grown silicon solar cell degradation , 2003 .

[50]  G. Hahn,et al.  From simulation to experiment: Understanding BO-regeneration kinetics , 2015 .

[51]  V. Voronkov,et al.  Latent complexes of interstitial boron and oxygen dimers as a reason for degradation of silicon-based solar cells , 2010 .

[52]  Hele Savin,et al.  Review of light-induced degradation in crystalline silicon solar cells , 2016 .

[53]  B. Pivac,et al.  Oxygen precipitation in silicon , 1995 .

[54]  K. Bothe,et al.  Kinetics of the electronically stimulated formation of a boron-oxygen complex in crystalline silicon , 2007 .

[55]  Thorsten Dullweber,et al.  Impurity-related limitations of next-generation industrial silicon solar cells , 2013, 2012 IEEE 38th Photovoltaic Specialists Conference (PVSC) PART 2.

[56]  K. Bothe,et al.  Effect of rapid thermal annealing on recombination centres in boron-doped Czochralski-grown silicon , 2014 .

[57]  K. Bothe,et al.  Impact of dopant compensation on the deactivation of boron-oxygen recombination centers in crystalline silicon , 2009 .

[58]  D. Macdonald,et al.  Recombination Activity and Impact of the Boron–Oxygen-Related Defect in Compensated N-Type Silicon , 2011, IEEE Journal of Photovoltaics.

[59]  K. Bothe,et al.  Fast-forming boron-oxygen-related recombination center in crystalline silicon , 2005 .

[60]  Karsten Bothe,et al.  Understanding and Reducing the Boron-Oxygen-Related Performance Degradation in Czochralski Silicon Solar Cells , 2003 .

[61]  Andres Cuevas,et al.  The impact of dopant compensation on the boron–oxygen defect in p‐ and n‐type crystalline silicon , 2011 .

[62]  K. Bothe,et al.  Formation and annihilation of the metastable defect in boron-doped Czochralski silicon , 2002, Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002..

[63]  R. Jones,et al.  Degradation of boron-doped Czochralski-grown silicon solar cells. , 2004, Physical review letters.

[64]  Giso Hahn,et al.  High Speed Regeneration of BO-Defects : Improving Long-Term Solar Cell Performance within Seconds , 2014 .

[65]  S. Wenham,et al.  Investigations on accelerated processes for the boron–oxygen defect in p-type Czochralski silicon , 2016 .

[66]  Karsten Bothe,et al.  Deactivation of the boron–oxygen recombination center in silicon by illumination at elevated temperature , 2008 .

[67]  Wilhelm Warta,et al.  Light-induced Degradation and Regeneration in n-type Silicon , 2015 .

[68]  R. Crabb Photon Induced Degradation of Electron and Proton Irradiated Silicon Solar Cells , 1973 .

[69]  A. Carvalho,et al.  Light induced degradation in B doped Cz‐Si solar cells , 2012 .

[70]  M. Schubert,et al.  Electrical characterization of the slow boron oxygen defect component in Czochralski silicon , 2015 .

[71]  Christian Möller,et al.  ASi-Sii-defect Model of Light-induced Degradation in Silicon☆ , 2014 .

[72]  R. Hall Electron-Hole Recombination in Germanium , 1952 .

[73]  V. Voronkov,et al.  The nature of boron-oxygen lifetime-degrading centres in silicon , 2016 .

[74]  V. Voronkov,et al.  Light-Induced Boron-Oxygen Recombination Centres in Silicon: Understanding their Formation and Elimination , 2013 .

[75]  Sébastien Dubois,et al.  Light-Induced-Degradation effects in boron–phosphorus compensated n-type Czochralski silicon , 2010 .

[76]  W. Wettling,et al.  Solar cells with efficiencies above 21% processed from Czochralski grown silicon , 1996, Conference Record of the Twenty Fifth IEEE Photovoltaic Specialists Conference - 1996.

[77]  D. Biro,et al.  Stability of the regeneration of the boron–oxygen complex in silicon solar cells during module integration , 2013 .

[78]  K. Bothe,et al.  Generation and annihilation of boron–oxygen-related recombination centers in compensated p- and n-type silicon , 2010 .

[79]  Christian Möller,et al.  Light‐induced degradation in indium‐doped silicon , 2013 .

[80]  R. Crandall Nature of the metastable boron-oxygen complex formation in crystalline silicon , 2010 .

[81]  Giuseppe Galbiati,et al.  Impact of compensation on the boron and oxygen-related degradation of upgraded metallurgical-grade silicon solar cells , 2014 .

[82]  Deren Yang,et al.  Study on permanent deactivation of the light-induced degradation in p-type compensated crystalline silicon solar cells , 2013 .

[83]  Stefan Rein,et al.  Lifetime Spectroscopy : A Method of Defect Characterization in Silicon for Photovoltaic Applications , 2005 .

[84]  M. Schubert,et al.  A Unified Parameterization of the Formation of Boron Oxygen Defects and their Electrical Activity , 2016 .

[85]  Martin A. Green,et al.  The Passivated Emitter and Rear Cell (PERC): From conception to mass production , 2015 .

[86]  K. Bothe,et al.  Light-induced Lifetime Degradation in Boron-doped Czochralski Silicon: Are Oxygen Dimers Involved? , 2013 .

[87]  S. Glunz,et al.  Comparison of boron- and gallium-doped p- type Czochralski silicon for photovoltaic application , 1999 .

[88]  Xinbo Yang,et al.  Upgraded metallurgical-grade silicon solar cells with efficiency above 20% , 2016 .

[89]  A. Cuevas,et al.  Electronic properties of light-induced recombination centers in boron-doped Czochralski silicon , 1999 .

[90]  R. Newman,et al.  Defects in silicon , 1982 .

[91]  Quantitative correlation of the metastable defect in Cz-silicon with different impurities , 2003, 3rd World Conference onPhotovoltaic Energy Conversion, 2003. Proceedings of.

[92]  J. Weber,et al.  Direct detection of carrier traps in Si solar cells after light‐induced degradation , 2015 .

[93]  V. Markevich,et al.  The oxygen dimer in Si: Its relationship to the light-induced degradation of Si solar cells? , 2011 .

[94]  G. Hahn,et al.  Investigations on the long time behavior of the metastable boron–oxygen complex in crystalline silicon , 2008 .

[95]  D. Macdonald,et al.  Light-induced boron-oxygen defect generation in compensated p-type Czochralski silicon , 2009 .

[96]  K. Bothe,et al.  Analysis of the defect activation in Cz-silicon by temperature-dependent bias-induced degradation of solar cells , 2003, 3rd World Conference onPhotovoltaic Energy Conversion, 2003. Proceedings of.

[97]  S. Estreicher,et al.  First-principles investigation of a bistable boron-oxygen interstitial pair in Si , 2006 .

[98]  G. Hahn,et al.  Boron-oxygen related defects in Cz-silicon solar cells degradation, regeneration and beyond , 2009 .

[99]  Ralf Preu,et al.  Impact of Hydrogen Concentration on the Regeneration of Light Induced Degradation , 2011 .

[100]  S. Wenham,et al.  Advanced Hydrogenation of Dislocation Clusters and Boron-oxygen Defects in Silicon Solar Cells , 2015 .

[101]  Stefan W. Glunz,et al.  Metastable defect in Cz-Si: electrical properties and quantitative correlation with different impurities , 2003, 3rd World Conference onPhotovoltaic Energy Conversion, 2003. Proceedings of.

[102]  K. Bothe,et al.  Electronically activated boron-oxygen-related recombination centers in crystalline silicon , 2006 .

[103]  K. Bothe,et al.  Effective reduction of the metastable defect concentration in boron-doped Czochralski silicon for solar cells , 2002, Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002..

[104]  B. Lim,et al.  Realistic efficiency potential of next‐generation industrial Czochralski‐grown silicon solar cells after deactivation of the boron–oxygen‐related defect center , 2016 .