Image-based autonomous micromanipulation system for arrangement of spheres in a scanning electron microscope

The micromanipulation technique in a scanning electron microscope (SEM) has been attracting interest as a technique to produce microstructures such as three-dimensional photonic crystals or advanced high-density electronic circuits. However, it is difficult to fabricate a large-scale structure or to conduct a systematic experiment using numbers of structures, as long as we rely on manually operated micromanipulation. In this study, we constructed an automatic system which arranges 10-μm-sized microspheres into a given two-dimensional pattern in a SEM. The spheres are picked up by touching with the center of the planar tip of a probe (needle), and placed on the substrate by moving the contact point to the edge of the tip and inclining the probe. The positions of the probe and the spheres are visually recognized from the SEM image from above and the optical microscope image from the side. The generalized Hough transform, which can robustly detect arbitrary shape from the edge fragments, is employed for the ...

[1]  K. Kendall,et al.  Surface energy and the contact of elastic solids , 1971, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences.

[2]  V. Levine.  Scanning Electron Microscopy/1973 , 1973 .

[3]  H. Kunoh.  The Conductive Staining Method Suitable for X-ray Microanalysis Micromanipulation of Plant Materials , 1975 .

[4]  B. Cox.  The nature of field emission sites , 1975 .

[5]  Microdissection within SEM using new micromanipulator. , 1981, Journal of electron microscopy.

[6]  Dana H. Ballard,et al.  Generalizing the Hough transform to detect arbitrary shapes , 1981, Pattern Recognit..

[7]  Larry S. Davis,et al.  Hierarchical generalized Hough transforms and line-segment based generalized H ugh transforms , 1982, Pattern Recognit..

[8]  L. Reimer,et al.  Scanning Electron Microscopy , 1984 .

[9]  K. Hokkirigawa,et al.  Analysis of the abrasive wear mechanism by successive observations of wear processes in a scanning electron microscope , 1986 .

[10]  P. Niedermann,et al.  Field emission from broad-area niobium cathodes: Effects of high-temperature treatment , 1986 .

[11]  L. Tenerz,et al.  Fracture testing of silicon microelements in situ in a scanning electron microscope , 1988 .

[12]  Josef Kittler,et al.  A survey of the hough transform , 1988, Comput. Vis. Graph. Image Process..

[13]  Luciano da Fontoura Costa,et al.  Semiautomated analysis of clay samples , 1991 .

[14]  John C. Russ,et al.  The Image Processing Handbook , 2016, Microscopy and Microanalysis.

[15]  Stefan Johansson,et al.  Assembling three-dimensional microstructures using gold-silicon eutectic bonding , 1994 .

[16]  M. Nakao,et al.  Prototypes of Micro Nontweezing Handling Tools with Releasing Mechanism , 1995 .

[17]  Yotaro Hatamura,et al.  Construction of Nano Manufacturing World , 1995 .

[18]  N. C. Krieger Lassen,et al.  Automatic localisation of electron backscattering pattern bands from Hough transform , 1996 .

[19]  Tomomasa Sato,et al.  Mechanical assembly of three-dimensional microstructures from fine particles , 1996, Adv. Robotics.

[20]  Norio Shinya,et al.  Powder Particle Manipulation and Assemblage Using Microprobe , 1996 .

[21]  Fumihiko Saitoh.  A Method for Detecting Circular Pads on a Module Board Using the Hough Transform for the Semiconductor Chip Placement Tool. , 1996 .

[22]  S. Akita,et al.  Carbon nanotube tips for a scanning probe microscope: their fabrication and properties , 1999 .

[23]  Mark J. Dyer,et al.  Three-dimensional manipulation of carbon nanotubes under a scanning electron microscope , 1999 .

[24]  Norio Shinya,et al.  Adhesion force measurement system for micro-objects in a scanning electron microscope , 2000 .

[25]  Shigeki Saito,et al.  Adhesion of micrometer-sized polymer particles under a scanning electron microscope , 2000 .

[26]  Hideki T. Miyazaki,et al.  Photonic band in two-dimensional lattices of micrometer-sized spheres mechanically arranged under a scanning electron microscope , 2000 .

[27]  Kunio Takahashi,et al.  Voltage required to detach an adhered particle by Coulomb interaction for micromanipulation , 2001 .

[28]  C. López,et al.  Nanorobotic Manipulation of Microspheres for On‐Chip Diamond Architectures , 2002 .

[29]  Tomomasa Sato,et al.  Micro-object Pick and Place Operation under SEM based on Micro-physics , 2002, J. Robotics Mechatronics.

[30]  H. Miyazaki,et al.  Anomalous scattering from dielectric bispheres in the specular direction. , 2002, Optics letters.

[31]  Bradley J. Nelson,et al.  Biological Cell Injection Using an Autonomous MicroRobotic System , 2002, Int. J. Robotics Res..

[32]  Tomomasa Sato,et al.  Kinematics of mechanical and adhesional micromanipulation under a scanning electron microscope , 2002 .

[33]  Shigeki Saito,et al.  Electrostatic detachment of an adhering particle from a micromanipulated probe , 2003 .

[34]  Shigeki Saito,et al.  Kinetic control of a particle by voltage sequence for a nonimpact electrostatic micromanipulation , 2003 .

[35]  H. Miyazaki,et al.  Microassembly of semiconductor three-dimensional photonic crystals , 2003, Nature materials.

[36]  Robert H. Reuss,et al.  Microelectronics packaging and integration , 2003 .

[37]  Ravi Mahajan,et al.  Critical Aspects of High-Performance Microprocessor Packaging , 2003 .

[38]  H. Miyazaki,et al.  Enhanced light diffraction from a double-layer microsphere lattice , 2003 .

[39]  H. Miyazaki,et al.  Light diffraction from a bilayer lattice of microspheres enhanced by specular resonance , 2004 .