Direct writing of planar ultracapacitors by laser forward transfer processing

We employ a novel laser forward transfer process, Matrix Assisted Pulsed Laser Evaporation Direct Write, in combination with UV laser micromachining, to fabricate mesoscale ultracapacitors and micro batteries under ambient temperature and atmospheric conditions. Our laser engineering approach enables the deposition of hydrous ruthenium oxide films with the desired high surface area morphology, without compromising the electrochemical performance of this high specific capacitance material. We compare three different desorption formulations incorporating ethylene glycol, glycerol, or sulfuric acid. The best electrochemical performance is achieved using a mixture of sulfuric acid with RuO2 0.5 H2O electrode material. Our ultracapacitors exhibit the expected linear discharge behavior under a constant current drain, and the electrochemical properties of these cells scale proportionately when combined in parallel and series.

[1]  Jim P. Zheng,et al.  Hydrous Ruthenium Oxide as an Electrode Material for Electrochemical Capacitors. , 1995 .

[2]  R. Kötz,et al.  Principles and applications of electrochemical capacitors , 2000 .

[3]  Bhanu Pratap,et al.  Laser Direct Writing of Hydrous Ruthenium Dioxide Micro-Pseudocapacitors , 2001 .

[4]  Young Soo Yoon,et al.  Solid-state thin-film supercapacitor with ruthenium oxide and solid electrolyte thin films , 2001 .

[5]  Terrill B. Atwater,et al.  Fuel cell/electrochemical capacitor hybrid for intermittent high power applications , 1999 .

[6]  B. Conway,et al.  The role and utilization of pseudocapacitance for energy storage by supercapacitors , 1997 .

[7]  B. V. Tilak,et al.  Materials for electrochemical capacitors: Theoretical and experimental constraints , 1996 .

[8]  Wendy G. Pell,et al.  Analysis of power limitations at porous supercapacitor electrodes under cyclic voltammetry modulation and dc charge , 2001 .

[9]  Jim P. Zheng,et al.  Hydrous Ruthenium Oxide as an Electrode Material for Electrochemical Capacitors , 1995 .

[10]  Russell Chung,et al.  Direct writing of electronic and sensor materials using a laser transfer technique , 2000 .

[11]  Debra R. Rolison,et al.  Structure of Hydrous Ruthenium Oxides: Implications for Charge Storage , 1999 .

[12]  J. Bates.  Thin-Film Lithium and Lithium-Ion Batteries , 2000 .

[13]  Larry L. Howell,et al.  Microbatteries for self-sustained hybrid micropower supplies , 2002 .

[14]  Alberto Piqué,et al.  Direct write microbatteries for next-generation microelectronic devices , 2001 .

[15]  R. A. McGill,et al.  New approach to laser direct writing active and passive mesoscopic circuit elements , 2000 .