Modulator for a micro Mach-Zhender spectrometer

A modulator fundamental part of Mach Zhender interferometer is studied. This interferometer has applications such as a sensor or spectral analyzer. The modulator was designed on a SOI substrate comprising a dual capacitor structure that allows the electro optical modulation through the overlap of the plasma dispersion effect (variations of the free carriers density due to electric field induced carrier depletion) with the guidewave mode that induce the change of the effective refractive index. The modulator is excited by a tension ramp between 0 and 2V yielding performance exceeding 7 GHz.

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