Progress with MEMS x-ray micro pore optics

Our development of ultra light-weight X-ray micro pore optics based on MEMS (Micro Electro Mechanical System) technologies is described. Using dry etching or X-ray lithography and electroplating, curvilinear sidewalls through a flat wafer are fabricated. Sidewalls vertical to the wafer surface are smoothed by use of high temperature annealing and/or magnetic field assisted finishing to work as X-ray mirrors. The wafer is then deformed to a spherical shape. When two spherical wafers with different radii of curvature are stacked, the combined system will be an approximated Wolter type-I telescope. This method in principle allows high angular resolution and ultra light-weight X-ray micro pore optics. In this paper, performance of a single-stage optic, coating of a heavy metal on sidewalls with atomic layer deposition, and assembly of a Wolter type-I telescope are reported.

[1]  Yuichiro Ezoe,et al.  Large-aperture focusing of x rays with micropore optics using dry etching of silicon wafers. , 2012, Optics letters.

[2]  Raul E. Riveros,et al.  Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes , 2010 .

[3]  Manabu Ishida,et al.  DIOS: the diffuse intergalactic oxygen surveyor: status and prospects , 2010, Astronomical Telescopes + Instrumentation.

[4]  C. H. Whitford,et al.  The mercury imaging X-ray spectrometer (MIXS) on BepiColombo , 2010 .

[5]  Yoshitaka Ishisaki,et al.  Micropore x-ray optics using anisotropic wet etching of (110) silicon wafers. , 2006, Applied optics.

[6]  Marcos Bavdaz,et al.  X-Ray Pore Optics Technologies and Their Application in Space Telescopes , 2010 .

[7]  Yuichiro Ezoe,et al.  Mems open the way to ultra-lightweight and low-cost x-ray optics , 2006 .

[8]  Keith A. Nugent,et al.  On the concentration, focusing, and collimation of x‐rays and neutrons using microchannel plates and configurations of holes , 1989 .

[9]  Tomohiro Ogawa,et al.  Progress on the magnetic field-assisted finishing of MEMS micropore x-ray optics , 2011, Optical Engineering + Applications.

[10]  Marcos Bavdaz,et al.  X-ray focusing with Wolter microchannel plate optics , 2002 .

[11]  Raul E. Riveros,et al.  Magnetic field-assisted finishing for micropore X-ray focusing mirrors fabricated by deep reactive ion etching , 2010 .

[12]  Yuichiro Ezoe,et al.  Simulation-Based Study of MEMS X-Ray Optics for Microanalysis , 2010, IEEE Journal of Quantum Electronics.

[13]  Hitomi Yamaguchi,et al.  Development of an alternating magnetic-field-assisted finishing process for microelectromechanical systems micropore x-ray optics. , 2010, Applied optics.

[14]  Stefan Kraft,et al.  Development of x-ray optics for the XEUS Mission , 2004, SPIE Optics + Photonics.

[15]  I Mitsuishi,et al.  Optical Image Analysis of the Novel Ultra-Lightweight and High-Resolution MEMS X-Ray Optics , 2010, IEEE Journal of Quantum Electronics.

[16]  Aa Wheeler,et al.  Handbook of Crystal Growth, Vol 1b , 1993 .

[17]  G. Pareschi,et al.  Surface smoothness requirements for the mirrors of the IXO x-ray telescope , 2009, Optical Engineering + Applications.

[18]  Raul E. Riveros,et al.  Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy , 2009, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.