Time response and dynamic behavior of electrostatic driven RF MEMS capacitive switches for phase shifter applications

This paper analyzes the effects of the materials, the driven voltage, the switch height, the width of the CPW signal line and the quality factor on the switching time and the dynamic behavior of electrostatic driven RF MEMS capacitive switches for the microwave distributed MEMS shifters to reduce the switching time and the impact velocity, and increase the capacitive ratio

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