A kind of preparation method of folding spiral inductance of the band magnetic core based on flexible substrate

The present invention relates to micro-nano technology field, particularly a kind of preparation method of folding spiral inductance of the band magnetic core based on flexible substrate.By the preparation method of planar inductor and the folding folding spiral inductance obtained that combines, with folding before compare, performance has obvious lifting; Compare with 3 D stereo inductance prepared by traditional handicraft, there is processing step simple, the advantage that cost is low.It is good that the inductance utilizing this method to prepare has performance, and volume is little, flexible (flexible collapsible), bio-compatibility is good, the features such as preparation method is simple, and can be widely used in various biology and abiotic micro-system, especially for the wireless energy transfer system of implanted.