Automatic Recognition of Defect Signatures and Notification of Tool Malfunctions - IECON'06
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We have developed an automatic method that efficiently detects the defect signatures of substrates and identifies possible problems pertaining to LSI/TFT-LCD manufacturing processes and tools. This system, which has no built-in libraries, can be applied to the mass production line of thin film devices. This method is useful to quickly detect problems that have been overlooked thus far
[1] E. Oja,et al. Independent Component Analysis , 2001 .
[2] Erkki Oja,et al. Independent Component Analysis , 2001 .