Automatic Recognition of Defect Signatures and Notification of Tool Malfunctions - IECON'06

We have developed an automatic method that efficiently detects the defect signatures of substrates and identifies possible problems pertaining to LSI/TFT-LCD manufacturing processes and tools. This system, which has no built-in libraries, can be applied to the mass production line of thin film devices. This method is useful to quickly detect problems that have been overlooked thus far