Carbon‐Enriched Amorphous Hydrogenated Boron Carbide Films for Very‐Low‐k Interlayer Dielectrics
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W. Lanford | S. King | P. Hopkins | J. Gaskins | B. J. Nordell | M. Paquette | A. Caruso | Patrick Henry | N. Oyler | S. Purohit | D. Gidley | Thuong D. Nguyen