Femtosecond laser pulse ablation of GaAs and InP: studies utilizing scanning and transmission electron microscopy

Single pulse laser ablation of GaAs and InP using 130 fs light pulses at ≈800 nm was studied with various techniques, in particular, scanning and transmission electron microscopies. The final state of the material near the laser-ablated region following femtosecond ablation was characterized in detail for selected laser fluences. Threshold ablation laser fluences were also obtained for both compounds.

[1]  A. Cavalleri,et al.  Picosecond–milliångström lattice dynamics measured by ultrafast X-ray diffraction , 1999, Nature.

[2]  J. Bonse,et al.  Ultrashort-pulse laser ablation of indium phosphide in air , 2001 .

[3]  Long,et al.  Pulsed laser-induced photochemical decomposition of GaAs(110) studied with time-resolved photoelectron spectroscopy using synchrotron radiation. , 1992, Physical review letters.

[4]  J. Liu.  Simple technique for measurements of pulsed Gaussian-beam spot sizes. , 1982, Optics letters.

[5]  A. Cavalleri,et al.  Femtosecond Structural Dynamics in VO2 during an Ultrafast Solid-Solid Phase Transition. , 2001, Physical review letters.

[6]  E. Mazur,et al.  Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy. , 2001, Optics letters.

[7]  W. Kautek,et al.  Femtosecond laser ablation of silicon–modification thresholds and morphology , 2002 .

[8]  A. Ostendorf,et al.  Polarization effects in ultrashort-pulse laser drilling , 1999 .

[9]  E. Campbell,et al.  Micromachining of quartz with ultrashort laser pulses , 1997 .

[10]  Klaus Sokolowski-Tinten,et al.  The physical mechanisms of short-pulse laser ablation , 2000 .

[11]  F. Krausz,et al.  Incubation of laser ablation in fused silica with 5-fs pulses , 1999 .

[12]  G. Weatherly,et al.  Transmission and scanning electron microscopy studies of single femtosecond- laser-pulse ablation of silicon , 2003 .

[13]  Klaus Sokolowski-Tinten,et al.  Femtosecond laser ablation of gallium arsenide investigated with time-of-flight mass spectroscopy , 1998 .

[14]  Boris N. Chichkov,et al.  Ablation of metals by ultrashort laser pulses , 1997 .

[15]  L. Capriotti,et al.  Thermodynamics of the quantum easy-plane antiferromagnet on the triangular lattice , 1999, cond-mat/9902024.

[16]  Roland E. Allen,et al.  Response of GaAs to fast intense laser pulses , 1998 .

[17]  Johnson,et al.  Time-resolved X-Ray diffraction from coherent phonons during a laser-induced phase transition , 2000, Physical review letters.

[18]  David Ashkenasi,et al.  Laser processing of sapphire with picosecond and sub-picosecond pulses , 1997 .

[19]  K. Sokolowski-Tinten,et al.  Femtosecond melting and ablation of semiconductors studied with time of flight mass spectroscopy , 1999 .

[20]  Suwas Nikumb,et al.  Experimental study of drilling sub-10 μm holes in thin metal foils with femtosecond laser pulses , 1999 .

[21]  Sergei I. Anisimov,et al.  Pulsed laser evaporation: equation-of-state effects , 1999 .

[22]  Klaus Sokolowski-Tinten,et al.  Transient States of Matter during Short Pulse Laser Ablation , 1998 .

[23]  J. P. Callan,et al.  GaAs under Intense Ultrafast Excitation: Response of the Dielectric Function , 1998 .

[24]  K. Sokolowski-Tinten,et al.  Ultrafast laser-induced order-disorder transitions in semiconductors. , 1995, Physical review. B, Condensed matter.

[25]  J G Fujimoto,et al.  Photonic device fabrication in glass by use of nonlinear materials processing with a femtosecond laser oscillator. , 2001, Optics letters.

[26]  D. Bäuerle.  Laser Processing and Chemistry , 1996 .

[27]  D. Leitner,et al.  Anharmonic lattice dynamics in germanium measured with ultrafast x-ray diffraction. , 2000, Physical review letters.

[28]  K. Sokolowski-Tinten,et al.  Two distinct transitions in ultrafast solid-liquid phase transformations of GaAs , 1991 .

[29]  P. P. Pronko,et al.  Thermophysical effects in laser processing of materials with picosecond and femtosecond pulses , 1995 .

[30]  G. Mourou,et al.  Laser ablation and micromachining with ultrashort laser pulses , 1997 .

[31]  Stampfli,et al.  Time dependence of the laser-induced femtosecond lattice instability of Si and GaAs: Role of longitudinal optical distortions. , 1994, Physical review. B, Condensed matter.