Schedulability and Scheduling of Dual-Arm Cluster Tools with Residency Time Constraints Based on Petri Net

Because of residency time constraints for cluster tools, it is very difficult to schedule them. This paper addresses their scheduling issues and conducts their schedulability analysis. A Petri net (PN) model, called resource-oriented PN (ROPN) is developed to model them. Based on it, for the first time, necessary and sufficient conditions under which the system is schedulable are presented. Meanwhile, an algorithm is developed for the scheduling of dual-armed cluster tool. The algorithm finds an optimal periodic schedule analytically if it is schedulable. A method is also presented for the implementation of the obtained cyclic schedule by appropriately controlling the initial transient process. Examples are presented to show the application and power of the theory and algorithm

[1]  Mengchu Zhou,et al.  Modeling and deadlock control of automated guided vehicle systems , 2004, IEEE/ASME Transactions on Mechatronics.

[2]  S. C. Wood,et al.  Simple performance models for integrated processing tools , 1996 .

[3]  MengChu Zhou,et al.  Avoiding deadlock and reducing starvation and blocking in automated manufacturing systems , 2001, IEEE Trans. Robotics Autom..

[4]  S. Venkatesh,et al.  A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots , 1997 .

[5]  Tae-Eog Lee,et al.  Scheduling analysis of time-constrained dual-armed cluster tools , 2003 .

[6]  Naiqi Wu,et al.  Necessary and sufficient conditions for deadlock-free operation in flexible manufacturing systems using a colored Petri net model , 1999, IEEE Trans. Syst. Man Cybern. Part C.

[7]  Babak Hamidzadeh,et al.  An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints , 2001, IEEE Trans. Robotics Autom..

[8]  M. Omizo,et al.  Modeling , 1983, Encyclopedic Dictionary of Archaeology.

[9]  MengChu Zhou,et al.  Modeling, Simulation, and Control of Flexible Manufacturing Systems - A Petri Net Approach , 1999, Series in Intelligent Control and Intelligent Automation.

[10]  MengChu Zhou,et al.  Modeling and deadlock avoidance of automated manufacturing systems with multiple automated guided vehicles , 2005, IEEE Transactions on Systems, Man, and Cybernetics, Part B (Cybernetics).

[11]  Tae-Eog Lee,et al.  Modeling and implementing a real-time scheduler for dual-armed cluster tools , 2001, Comput. Ind..

[12]  R. S. Gyurcsik,et al.  Single-wafer cluster tool performance: an analysis of throughput , 1994 .

[13]  Wlodzimierz M. Zuberek,et al.  Timed Petri nets in modeling and analysis of cluster tools , 2001, IEEE Trans. Robotics Autom..