Abstract The aim of this paper is to analyze some Fe-based amorphous thin films as sensing elements for magnetoelastic microsensors. Fe-based amorphous thin films with thickness ranging from 0.1 to 1 μm are prepared by r.f. sputtering method. Their magnetic properties (saturation magnetization M s , magnetic anisotropy constant k u and Curie temperature T C ), determining the performance of the material used as magnetoelastic sensing element, are investigated in correlation with the magnetoelastic properties (saturation magnetostriction λ s , magnetoelastic coupling coefficient b γ ,2 , magnetostrictive strain coefficient D and Δ E -effect). The magnetic and magnetoelastic characterizations of the samples are performed using a torque magnetometer and a capacitive cantilever technique, respectively. Based on the obtained results, we discuss the specific qualities of the Fe-based amorphous thin films in terms of their relevant material characteristics for magnetoelastic sensing application in comparison to the conventional magnetostrictive thin films presently in use.
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