A novel MCM package enabling proximity communication I-O

A novel packaging approach is described that is based on micro-machined features integrated into CMOS chips. Our solution combines two key self-alignment mechanisms for the first time: solder reflow self-alignment and a novel micro-ball and pyramidal pit for passive self-alignment. We report on the demonstration of a MCM package with large footprint semiconductor CMOS chips interconnected by Proximity Communication (PxC), characterization of their high accuracy assembly process, and metrology of the resulting chip misalignment. Our goal is to develop a scalable, lead-free packaging approach by which large NxN PxC-enabled chip arrays are assembled with high precision on organic substrates in a cost effective manner while using industry standard parts and tooling.

[1]  R. Ho,et al.  Proximity Communication flip-chip package with micron chip-to-chip alignment tolerances , 2009, 2009 59th Electronic Components and Technology Conference.

[2]  Arka Majumdar,et al.  Alignment and Performance Considerations for Capacitive, Inductive, and Optical Proximity Communication , 2010, IEEE Transactions on Advanced Packaging.

[3]  Ron Ho,et al.  Enabling technologies for multi-chip integration using Proximity Communication , 2009, 2009 International Symposium on VLSI Design, Automation and Test.

[4]  Xuezhe Zheng,et al.  Aligning Chips Face-to-Face for Dense Capacitive and Optical Communication , 2010, IEEE Transactions on Advanced Packaging.

[5]  R. Ho,et al.  Integration and Packaging of a Macrochip With Silicon Nanophotonic Links , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[6]  R. Ho,et al.  Proximity communication , 2004, IEEE Journal of Solid-State Circuits.

[7]  Y.C. Lee,et al.  Soldering technology for optoelectronic packaging , 1996, 1996 Proceedings 46th Electronic Components and Technology Conference.

[8]  R. Ho,et al.  Novel packaging with rematable spring interconnect chips for MCM , 2009, 2009 59th Electronic Components and Technology Conference.