Thermopile infrared detector fabricated with dry silicon etchant XeF2
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[1] Tayfun Akin,et al. An integrated thermopile structure with high responsivity using any standard CMOS process , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[2] S. D. Collins,et al. A bulk micromachined silicon thermopile with high sensitivity , 2003 .
[3] K. Wise,et al. A silicon-thermopile-based infrared sensing array for use in automated manufacturing , 1986, IEEE Transactions on Electron Devices.
[4] Henry Baltes,et al. Thermoelectric infrared sensors in CMOS technology , 1993 .
[5] Tayfun Akin,et al. An integrated thermopile structure with high responsivity using any standard CMOS process , 1998 .