Synthesis and Characterization of a High‐Purity AlN Powder

High-purity AIN powder was synthesized by preparing high-purity (NH4)3 AIF6, decomposing the (NH4)3 AIF6 to AIF3, and reacting the AIF, at 800° to 1000°C with high-purity NH3. AIN powders could be synthesized with a cation purity of 99.99% and an oxygen content <0.2 wt%. The specific surface area depended on the process conditions and varied from 0.2 to 2.6 m2/g. The thermodynamics of the process are evaluated and the influence of various process parameters on the resulting powder characteristics are described.