论文信息 - Improved EOT and leakage current for metal-insulator-metal capacitor stacks with rutile TiO2 - 字舞流文

Improved EOT and leakage current for metal-insulator-metal capacitor stacks with rutile TiO2

O. Richard | H. Bender | L. Altimime | J. Kittl | A. Franquet | J. Swerts | T. Conard | H. Tielens | M. Popovici | A. Moussa | Min-Soo Kim | S. Elshocht | K. Tomida