论文信息 - Deposition, evaluation and control of 4H and 6H SiC epitaxial layers for device applications - 字舞流文

Deposition, evaluation and control of 4H and 6H SiC epitaxial layers for device applications

J. Bluet | E. Neyret | D. Anglos | J. Pernot | T. Billon | L. Cioccio | M. Lagadas | P. Vicente