论文信息 - Design and fabrication of novel microlens–micromirrors array for infrared focal plane array

Design and fabrication of novel microlens–micromirrors array for infrared focal plane array

A simple method on fabricating a novel structure of microlens–micromirrors array (MMA) with 100% fill factor and smooth surface profile is presented. The MMA has a special structure, which has a microlens array with foot diameter of 35 μm on the upper layer and a micromirrors array with top width of 50 μm and bottom width of 30 μm on the lower layer. These two arrays are connected by a thin layer of silicon. The new structure has potential to integrate with infrared focal plane arrays (IRFPAs). An analytical optical model is established and experimentally verified; results show that all of the incident infrared lights within a certain range can be absorbed by the photosensitive surface of IRFPAs with this structure. © 2012 Wiley Periodicals, Inc. Microwave Opt Technol Lett 54:879–884, 2012; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.26722

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