论文信息 - Design and Simulation of Sensors

Design and Simulation of Sensors

Computer-aided design and simulation of silicon microsensors and micromechanical structures in Standard CMOS or bipolar IC technology with or without additional processing steps are reviewed. Examples include integrated magnetotransistors, humidity sensors and flow meters.

Henry Baltes | H. Baltes

[1] Arokia Nathan,et al. Noise correlation and operating conditions of dual-collector magnetotransistors , 1991 .

[2] H. Baltes,et al. Field oxide microbridges, cantilever beams, coils and suspended membranes in SACMOS technology , 1990 .

[3] K. Maenaka,et al. Monolithic silicon magnetic compass , 1990 .

[4] Jan G. Korvink,et al. Three-dimensional modelling of capacitive humidity sensors , 1990 .

[5] D. D. Denton,et al. Effects of aging on polyimide: a study of bulk and interface chemistry , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[6] David Moser,et al. Finite-Element Simulation of Silicon Accelerometers , 1990 .

[7] Walter Allegretto,et al. Numerical analysis of magnetic-field-sensitive bipolar devices , 1991, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[8] Edoardo Charbon,et al. Design of an Integrated Humidity Sensor with Digital Output in Double Metal CMOS Technology , 1990 .

[9] Kristian Søe Højberg. Mikrodatamat-baseret oliemåler , 1981 .