GENETIC ALGORITHM BASED MULTIDISCIPLINARY DESIGN OPTIMIZATION OF MICROMACHINED GYROSCOPE

Micromachined gyroscope is a kind of typical micro-electro-mechanical system(MEMS) device, which consists of sensor, actuator, and control circuit, etc. Considering the influence of fabrication condition, structural frequency, readout circuit, and environmental quality factor on the behaviors of MEMS, a multidisciplinary conceptual model was developed for maximizing the whole performance of micromachined tuning fork gyroscope. Under the constraints of the proposed multidisciplinary design model, genetic algorithm was applied to obtain the optimum of mechanical sensitivity. The results from optimization were verified using the finite element analysis software-ANSYS. It is demonstrated that this approach is very effective for the global design optimization of micromachined gyroscope compared with the traditional gradient-based method and also can be used to the systematic design of other MEMS devices.