Design, modeling and testing of a 3-DOF flexible piezoelectric thin sheet nanopositioner

Abstract This paper proposes a novel 3-DOF (degree-of-freedom) flexible nanopositioner constructed from unimorph piezoelectric actuators and compliant flexures, featured with a compact size, low-cost and large stroke design, which is significantly different from the typical piezo-stack driven micro/nano-stages and the existing thin sheet nanopositioners. The model of the flexible nanopositioner is established by the compliance matrix method, which can be used to analyze the relationship between the structural parameters and system output characteristics and dynamical properties. Meanwhile, the modeling and analysis approach provides a guidance of geometry optimization of the proposed piezoelectric nanopositioners and paves the road for control of such systems. Furthermore, a real-time experimental apparatus with two PSDs (position sensitive detectors) is also proposed and fabricated to validate the static and dynamic characteristics of the flexible piezoelectric thin sheet (PZT-5A) nanopositioner, where comprehensive experiments are deployed demonstrating good agreement between theoretical results and experiments.

[1]  A. Fleming,et al.  A Five-Axis Monolithic Nanopositioning Stage Constructed from a Bimorph Piezoelectric Sheet , 2019, 2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS).

[2]  Yanling Tian,et al.  A novel XYZ micro/nano positioner with an amplifier based on L-shape levers and half-bridge structure , 2020 .

[3]  Junyi Cao,et al.  Design, Pseudostatic Model, and PVDF-Based Motion Sensing of a Piezo-Actuated XYZ Flexure Manipulator , 2018, IEEE/ASME Transactions on Mechatronics.

[4]  J. Ouyang,et al.  An improved model analysis approach for hybrid thermo-piezoelectric micro actuator with thermo-piezoelectric coupling , 2019, Measurement.

[5]  Hong-tao Wang,et al.  Size-dependent constituent equations of piezoelectric bimorphs , 2016 .

[6]  Guangbo Hao,et al.  A flexure motion stage system for light beam control , 2018, Microsystem Technologies.

[7]  Wei Zhu,et al.  Modeling and control of a two-axis fast steering mirror with piezoelectric stack actuators for laser beam tracking , 2015 .

[8]  Guangbo Hao,et al.  Design, modelling and analysis of a completely-decoupled XY compliant parallel manipulator , 2016 .

[9]  Masayoshi Esashi,et al.  Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb doped PZT thin film , 2015 .

[10]  Qingsong Xu,et al.  Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage , 2017 .

[11]  Junyi Cao,et al.  Optimal design of a piezo-actuated 2-DOF millimeter-range monolithic flexure mechanism with a pseudo-static model , 2019, Mechanical Systems and Signal Processing.

[12]  Yanling Tian,et al.  Design and control of a novel asymmetrical piezoelectric actuated microgripper for micromanipulation , 2018 .

[13]  Fujun Wang,et al.  A 2-DOF Monolithic Compliant Rotation Platform Driven by Piezoelectric Actuators , 2020, IEEE Transactions on Industrial Electronics.

[14]  K. Leang,et al.  Design and Control of a Three-Axis Serial-Kinematic High-Bandwidth Nanopositioner , 2012, IEEE/ASME Transactions on Mechatronics.

[15]  Jari Juuti,et al.  The effects of substrate layer thickness on piezoelectric vibration energy harvesting with a bimorph type cantilever , 2018, Mechanical Systems and Signal Processing.

[16]  Wei-Hsin Liao,et al.  A New Two-Axis Optical Scanner Actuated by Piezoelectric Bimorphs , 2012 .

[17]  Xun Chen,et al.  Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property , 2018, IEEE Transactions on Industrial Electronics.

[18]  Huikai Xie,et al.  A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift , 2011 .

[19]  J. Ouyang,et al.  A generalized approach on bending and stress analysis of beams with piezoelectric material bonded , 2019, Sensors and Actuators A: Physical.

[20]  Moon G. Lee,et al.  A novel laser micro/nano-machining system for FPD process , 2008 .

[21]  Yi Yang,et al.  A novel amplification ratio model of a decoupled XY precision positioning stage combined with elastic beam theory and Castigliano's second theorem considering the exact loading force , 2020 .

[22]  Fujun Wang,et al.  Development and control of a large range XYΘ micropositioning stage , 2020 .

[24]  Kazuhiko Adachi,et al.  Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3 thin film on titanium substrate , 2012 .

[25]  Yonghong Tan,et al.  A Modeling Method of Electromagnetic Micromirror in Random Noisy Environment , 2020, IEEE Transactions on Systems, Man, and Cybernetics: Systems.

[26]  Yuen Kuan Yong,et al.  An Ultrathin Monolithic XY Nanopositioning Stage Constructed From a Single Sheet of Piezoelectric Material , 2017, IEEE/ASME Transactions on Mechatronics.

[28]  Andrew J. Fleming,et al.  Design of a Charge Drive for Reducing Hysteresis in a Piezoelectric Bimorph Actuator , 2016, IEEE/ASME Transactions on Mechatronics.

[29]  Savvas Damaskinos,et al.  A 2-D Micromachined SOI MEMS Mirror With Sidewall Electrodes for Biomedical Imaging , 2010, IEEE/ASME Transactions on Mechatronics.