Process and material properties of polydimethylsiloxane (PDMS) for Optical MEMS

[1]  Analysis of elastic micro optical components under large deformation , 2003 .

[2]  G. Whitesides,et al.  Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their actuation by electro-osmotic flow , 1999 .

[3]  Jaroslav Mackerle,et al.  Rubber and rubber-like materials, finite-element analyses and simulations, an addendum: a bibliography (1997?2003) , 2004 .

[4]  Hiroyuki Kudo,et al.  A flexible and wearable glucose sensor based on functional polymers with soft-MEMS techniques. , 2006, Biosensors & bioelectronics.

[5]  S. Quake,et al.  From micro- to nanofabrication with soft materials. , 2000, Science.

[6]  De-Ying Zhang,et al.  Integrated fluidic adaptive zoom lens. , 2004, Optics letters.

[7]  A. Werber,et al.  Tunable, membrane-based, pneumatic micro-mirrors , 2005, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005..

[8]  S. Quake,et al.  Monolithic microfabricated valves and pumps by multilayer soft lithography. , 2000, Science.

[9]  Hyung-Kew Lee,et al.  A Flexible Polymer Tactile Sensor: Fabrication and Modular Expandability for Large Area Deployment , 2006, Journal of Microelectromechanical Systems.

[10]  Mechanical properties of antibacterial silicone rubber for hydrocephalus shunts. , 1979, Journal of biomedical materials research.

[11]  Mark Bücking,et al.  A novel electronic nose based on miniaturized SAW sensor arrays coupled with SPME enhanced headspace-analysis and its use for rapid determination of volatile organic compounds in food quality monitoring , 2006 .

[12]  J. S. Reed,et al.  Principles of ceramics processing , 1995 .

[13]  Weisong Wang,et al.  Variable-focusing microlens with microfluidic chip , 2004 .

[14]  Ki-Hun Jeong,et al.  Tunable microdoublet lens array , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

[15]  Ryutaro Maeda,et al.  A pneumatically-actuated three-way microvalve fabricated with polydimethylsiloxane using the membrane transfer technique , 2000 .

[16]  J. Heo,et al.  Tactile sensor arrays using fiber Bragg grating sensors , 2006 .

[17]  U. Wallrabe,et al.  Low Cost Adaptive Silicone Membrane Lens , 2007, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics.

[18]  Paul Kobrin,et al.  Mechanical modeling of fluid-driven polymer lenses. , 2008, Applied optics.

[19]  Ulrike Wallrabe,et al.  Mechanical properties of silicones for MEMS , 2008 .