Characterization of evaporated silicon and silicon monoxide films by inelastic electron tunneling spectroscopy

Vibrational spectra of thin (1-2 nm) films of evaporated silicon and silicon monoxide on alumina surfaces have been measured by inelastic electron tunneling spectroscopy. Analysis of the tunneling spectra of the Si and SiO films and comparison with the vibrational spectra of surface species on crystalline Si formed from reactions with hydrogen atoms, water, and oxygen measured by high-resolution electron energy loss spectroscopy and multiple internal reflection infrared spectroscopy showed the formation of silicon hydride species