New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes
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Tino Hausotte | Eberhard Manske | T. Machleidt | Rostyslav Mastylo | Gerd Jäger | T. Hausotte | G. Jäger | E. Manske | K-H Franke | R. Mastylo | T. Machleidt | K. Franke
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