论文信息 - Microstructure and composition analysis of Cu-Cu2O cermet films deposited by d.c. reactive magnetron sputtering - 字舞流文

Microstructure and composition analysis of Cu-Cu2O cermet films deposited by d.c. reactive magnetron sputtering

G. M. Rao | S. Mohan | T. Balasubramanian | T. Panchapagesan | H. S. Shamsunder

[1] G. M. Rao,et al. Studies on glow‐discharge characteristics during dc reactive magnetron sputtering , 1991 .

[2] G. M. Rao,et al. Preparation and characterization of Cu-Cu2O cermet films , 1990 .

[3] A. Roos,et al. Optical properties and spectral selectivity of copper oxide on stainless steel , 1984 .

[4] V. Drobny,et al. Properties of reactively-sputtered copper oxide thin films , 1979 .

[5] R. K. Waits. Planar magnetron sputtering , 1978 .

[6] Ping Sheng,et al. Structural and electrical properties of granular metal films , 1975 .

[7] S. Mohan,et al. Design aspects and performance evaluation of a planar magnetron , 1990 .