VARIABLE FREQUENCY CONTROL FOR SPIDER-DRIVEN ULTRA-PRECISION STAGES

Abstract This paper proposes a variable control method of drive frequency for the SPIDER-driven precision stage. Control performances such as positioning accuracy and maximum velocity strongly depend on the drive frequency. At first, the identification experiments of the SPIDER with different drive frequency are carried out. Next the gain-scheduled control strategy for the variable frequency control, considering the variation rate of the frequency is introduced. Finally, simulations and experiments are performed in order to verify the efficiency of the proposed control method.