Spectrum Simulation in DTSA-II

Abstract Spectrum simulation is a useful practical and pedagogical tool. Particularly with complex samples or trace constituents, a simulation can help to understand the limits of the technique and the instrument parameters for the optimal measurement. DTSA-II, software for electron probe microanalysis, provides both easy to use and flexible tools for simulating common and less common sample geometries and materials. Analytical models based on ϕ(ρz) curves provide quick simulations of simple samples. Monte Carlo models based on electron and X-ray transport provide more sophisticated models of arbitrarily complex samples. DTSA-II provides a broad range of simulation tools in a framework with many different interchangeable physical models. In addition, DTSA-II provides tools for visualizing, comparing, manipulating, and quantifying simulated and measured spectra.

[1]  G. Love,et al.  Quantitative Electron Probe Microanalysis , 2001 .

[2]  R. H. Pratt,et al.  Shape functions for atomic-field bremsstrahlung from electrons of kinetic energy 1–500 keV on selected neutral atoms 1 ≤ Z ≤ 92 , 1983 .

[3]  J. Sempau,et al.  Monte Carlo simulation of bremsstrahlung emission by electrons , 2002 .

[4]  J.-L. Pouchou,et al.  Quantitative Analysis of Homogeneous or Stratified Microvolumes Applying the Model “PAP” , 1991 .

[5]  B. L. Henke,et al.  X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92 , 1993 .

[6]  Karen J. Olsen,et al.  X-Ray Form Factor, Attenuation and Scattering Tables (version 2.0) , 2003 .

[7]  Gf Giel Bastin,et al.  PROZA96: an improved matrix correction program for electron probe microanalysis, based on a double Gaussian ϕ(ρz) approach , 1998 .

[8]  Jeremiah R. Lowney,et al.  Monte Carlo modeling of secondary electron imaging in three dimensions , 2007, SPIE Advanced Lithography.

[9]  F. Scholze,et al.  The Determination of the Efficiency of Energy Dispersive X-Ray Spectrometers by a New Reference Material , 2006, Microscopy and Microanalysis.

[10]  E. Casnati,et al.  CORRIGENDUM: An empirical approach to K-shell ionisation cross section by electrons , 1982 .

[11]  Nicholas W. M. Ritchie,et al.  A new Monte Carlo application for complex sample geometries , 2005 .

[12]  D. Newbury,et al.  Modeling of the bremsstrahlung radiation produced in pure‐element targets by 10–40 keV electrons , 1987 .

[13]  David C. Joy,et al.  An empirical stopping power relationship for low‐energy electrons , 1989 .

[14]  William H. Press,et al.  Numerical Recipes in FORTRAN - The Art of Scientific Computing, 2nd Edition , 1987 .

[15]  Francesc Salvat,et al.  Calculations of inner-shell ionization by electron impact with the distorted-wave and plane-wave Born approximations , 2008 .

[16]  Martin J. Berger,et al.  Bremsstrahlung energy spectra from electrons with kinetic energy 1 keV–10 GeV incident on screened nuclei and orbital electrons of neutral atoms with Z = 1–100 , 1986 .

[17]  Joab R Winkler,et al.  Numerical recipes in C: The art of scientific computing, second edition , 1993 .

[18]  David C. Joy,et al.  Calculations of Mott scattering cross section , 1990 .